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Atomic layer deposition of metal phosphates

Lowie Henderick (UGent) , Arpan Dhara (UGent) , Andreas Werbrouck (UGent) , Jolien Dendooven (UGent) and Christophe Detavernier (UGent)
(2022) APPLIED PHYSICS REVIEWS. 9(1).
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Abstract
Because of their unique structural, chemical, optical, and biological properties, metal phosphate coatings are highly versatile for various applications. Thermodynamically facile and favorable functionalization of phosphate moieties (like orthophosphates, metaphosphates, pyrophosphates, and phosphorus-doped oxides) makes them highly sought-after functional materials as well. Being a sequential self-limiting technique, atomic layer deposition has been used for producing high-quality conformal coatings with sub-nanometer control. In this review, different atomic layer deposition-based strategies used for the deposition of phosphate materials are discussed. The mechanisms underlying those strategies are discussed, highlighting advantages and limitations of specific process chemistries. In a second part, the application of metal phosphates deposited through atomic layer deposition in energy storage and other emerging technologies such as electrocatalysis, biomedical, or luminescence applications are summarized. Next to this, perspectives on untangled knowledge gaps and opportunities for future research are also emphasized.
Keywords
LITHIUM PHOSPHORUS OXYNITRIDE, SOLID-STATE BATTERIES, THIN-FILMS, ALUMINUM PHOSPHATE, COBALT PHOSPHATE, LUMINESCENT PROPERTIES, TITANIUM, PHOSPHATE, CATHODE MATERIALS, IRON PHOSPHATE, ELECTRODE

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Citation

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MLA
Henderick, Lowie, et al. “Atomic Layer Deposition of Metal Phosphates.” APPLIED PHYSICS REVIEWS, vol. 9, no. 1, 2022, doi:10.1063/5.0069647.
APA
Henderick, L., Dhara, A., Werbrouck, A., Dendooven, J., & Detavernier, C. (2022). Atomic layer deposition of metal phosphates. APPLIED PHYSICS REVIEWS, 9(1). https://doi.org/10.1063/5.0069647
Chicago author-date
Henderick, Lowie, Arpan Dhara, Andreas Werbrouck, Jolien Dendooven, and Christophe Detavernier. 2022. “Atomic Layer Deposition of Metal Phosphates.” APPLIED PHYSICS REVIEWS 9 (1). https://doi.org/10.1063/5.0069647.
Chicago author-date (all authors)
Henderick, Lowie, Arpan Dhara, Andreas Werbrouck, Jolien Dendooven, and Christophe Detavernier. 2022. “Atomic Layer Deposition of Metal Phosphates.” APPLIED PHYSICS REVIEWS 9 (1). doi:10.1063/5.0069647.
Vancouver
1.
Henderick L, Dhara A, Werbrouck A, Dendooven J, Detavernier C. Atomic layer deposition of metal phosphates. APPLIED PHYSICS REVIEWS. 2022;9(1).
IEEE
[1]
L. Henderick, A. Dhara, A. Werbrouck, J. Dendooven, and C. Detavernier, “Atomic layer deposition of metal phosphates,” APPLIED PHYSICS REVIEWS, vol. 9, no. 1, 2022.
@article{8748830,
  abstract     = {{Because of their unique structural, chemical, optical, and biological properties, metal phosphate coatings are highly versatile for various applications. Thermodynamically facile and favorable functionalization of phosphate moieties (like orthophosphates, metaphosphates, pyrophosphates, and phosphorus-doped oxides) makes them highly sought-after functional materials as well. Being a sequential self-limiting technique, atomic layer deposition has been used for producing high-quality conformal coatings with sub-nanometer control. In this review, different atomic layer deposition-based strategies used for the deposition of phosphate materials are discussed. The mechanisms underlying those strategies are discussed, highlighting advantages and limitations of specific process chemistries. In a second part, the application of metal phosphates deposited through atomic layer deposition in energy storage and other emerging technologies such as electrocatalysis, biomedical, or luminescence applications are summarized. Next to this, perspectives on untangled knowledge gaps and opportunities for future research are also emphasized.}},
  articleno    = {{011310}},
  author       = {{Henderick, Lowie and Dhara, Arpan and Werbrouck, Andreas and Dendooven, Jolien and Detavernier, Christophe}},
  issn         = {{1931-9401}},
  journal      = {{APPLIED PHYSICS REVIEWS}},
  keywords     = {{LITHIUM PHOSPHORUS OXYNITRIDE,SOLID-STATE BATTERIES,THIN-FILMS,ALUMINUM PHOSPHATE,COBALT PHOSPHATE,LUMINESCENT PROPERTIES,TITANIUM,PHOSPHATE,CATHODE MATERIALS,IRON PHOSPHATE,ELECTRODE}},
  language     = {{eng}},
  number       = {{1}},
  pages        = {{36}},
  title        = {{Atomic layer deposition of metal phosphates}},
  url          = {{http://doi.org/10.1063/5.0069647}},
  volume       = {{9}},
  year         = {{2022}},
}
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