Determination of optical constants of thin films in the EUV
- Author
- Richard Ciesielski, Qais Saadeh, Vicky Philipsen, Karl Opsomer, Jean-Philippe Soulie, Meiyi Wu, Philipp Naujok, Robbert W. E. van de Kruijs, Christophe Detavernier (UGent) , Michael Kolbe, Frank Scholze and Victor Soltwisch
- Organization
- Keywords
- SOFT-X-RAY, EXTREME-ULTRAVIOLET, MULTILAYER MIRRORS, TOTAL-REFLECTION, SCATTERING, SURFACE, ATTENUATION, MOLYBDENUM, ABSORPTION, TABULATION
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Citation
Please use this url to cite or link to this publication: http://hdl.handle.net/1854/LU-8748829
- MLA
- Ciesielski, Richard, et al. “Determination of Optical Constants of Thin Films in the EUV.” APPLIED OPTICS, vol. 61, no. 8, 2022, pp. 2060–78, doi:10.1364/AO.447152.
- APA
- Ciesielski, R., Saadeh, Q., Philipsen, V., Opsomer, K., Soulie, J.-P., Wu, M., … Soltwisch, V. (2022). Determination of optical constants of thin films in the EUV. APPLIED OPTICS, 61(8), 2060–2078. https://doi.org/10.1364/AO.447152
- Chicago author-date
- Ciesielski, Richard, Qais Saadeh, Vicky Philipsen, Karl Opsomer, Jean-Philippe Soulie, Meiyi Wu, Philipp Naujok, et al. 2022. “Determination of Optical Constants of Thin Films in the EUV.” APPLIED OPTICS 61 (8): 2060–78. https://doi.org/10.1364/AO.447152.
- Chicago author-date (all authors)
- Ciesielski, Richard, Qais Saadeh, Vicky Philipsen, Karl Opsomer, Jean-Philippe Soulie, Meiyi Wu, Philipp Naujok, Robbert W. E. van de Kruijs, Christophe Detavernier, Michael Kolbe, Frank Scholze, and Victor Soltwisch. 2022. “Determination of Optical Constants of Thin Films in the EUV.” APPLIED OPTICS 61 (8): 2060–2078. doi:10.1364/AO.447152.
- Vancouver
- 1.Ciesielski R, Saadeh Q, Philipsen V, Opsomer K, Soulie J-P, Wu M, et al. Determination of optical constants of thin films in the EUV. APPLIED OPTICS. 2022;61(8):2060–78.
- IEEE
- [1]R. Ciesielski et al., “Determination of optical constants of thin films in the EUV,” APPLIED OPTICS, vol. 61, no. 8, pp. 2060–2078, 2022.
@article{8748829,
author = {{Ciesielski, Richard and Saadeh, Qais and Philipsen, Vicky and Opsomer, Karl and Soulie, Jean-Philippe and Wu, Meiyi and Naujok, Philipp and van de Kruijs, Robbert W. E. and Detavernier, Christophe and Kolbe, Michael and Scholze, Frank and Soltwisch, Victor}},
issn = {{1559-128X}},
journal = {{APPLIED OPTICS}},
keywords = {{SOFT-X-RAY,EXTREME-ULTRAVIOLET,MULTILAYER MIRRORS,TOTAL-REFLECTION,SCATTERING,SURFACE,ATTENUATION,MOLYBDENUM,ABSORPTION,TABULATION}},
language = {{eng}},
number = {{8}},
pages = {{2060--2078}},
title = {{Determination of optical constants of thin films in the EUV}},
url = {{http://dx.doi.org/10.1364/AO.447152}},
volume = {{61}},
year = {{2022}},
}
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