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Micro-transfer printed silicon nitride grating couplers for efficient on-chip light coupling

Zuyang Liu (UGent) , Grigorij Muliuk (UGent) , Jing Zhang (UGent) , Günther Roelkens (UGent) , Nicolas Le Thomas (UGent) and Roel Baets (UGent)
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Abstract
We demonstrate a new post-processing approach to efficiently couple light in silicon nitride (Si3N4) photonic integrated circuits (PIC) via grating couplers. Thin-film coupons of apodised Si3N4 grating couplers functionalized with metallic bottom reflectors and adiabatic couplers are micro-transfer printed onto the input and output of Si3N4 waveguides, providing efficient coupling without jeopardizing the rest of the PIC. Two-dimensional FDTD simulations predict coupling efficiencies as large as 70% (-1.5dB) at a wavelength of 785nm. As a proof-of-concept, we report an experimental coupling efficiency of -4.6dB, which is 2.6dB better than the values obtained with standard designs of grating couplers.
Keywords
Micro-transfer printing, grating coupler, silicon nitride

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MLA
Liu, Zuyang, et al. “Micro-Transfer Printed Silicon Nitride Grating Couplers for Efficient on-Chip Light Coupling.” Integrated Optics : Devices, Materials, and Technologies XXVI, edited by Sonia M. García-Blanco and Pavel Cheben, vol. 12004, SPIE, 2022, doi:10.1117/12.2626309.
APA
Liu, Z., Muliuk, G., Zhang, J., Roelkens, G., Le Thomas, N., & Baets, R. (2022). Micro-transfer printed silicon nitride grating couplers for efficient on-chip light coupling. In S. M. García-Blanco & P. Cheben (Eds.), Integrated optics : devices, materials, and technologies XXVI (Vol. 12004). https://doi.org/10.1117/12.2626309
Chicago author-date
Liu, Zuyang, Grigorij Muliuk, Jing Zhang, Günther Roelkens, Nicolas Le Thomas, and Roel Baets. 2022. “Micro-Transfer Printed Silicon Nitride Grating Couplers for Efficient on-Chip Light Coupling.” In Integrated Optics : Devices, Materials, and Technologies XXVI, edited by Sonia M. García-Blanco and Pavel Cheben. Vol. 12004. SPIE. https://doi.org/10.1117/12.2626309.
Chicago author-date (all authors)
Liu, Zuyang, Grigorij Muliuk, Jing Zhang, Günther Roelkens, Nicolas Le Thomas, and Roel Baets. 2022. “Micro-Transfer Printed Silicon Nitride Grating Couplers for Efficient on-Chip Light Coupling.” In Integrated Optics : Devices, Materials, and Technologies XXVI, ed by. Sonia M. García-Blanco and Pavel Cheben. Vol. 12004. SPIE. doi:10.1117/12.2626309.
Vancouver
1.
Liu Z, Muliuk G, Zhang J, Roelkens G, Le Thomas N, Baets R. Micro-transfer printed silicon nitride grating couplers for efficient on-chip light coupling. In: García-Blanco SM, Cheben P, editors. Integrated optics : devices, materials, and technologies XXVI. SPIE; 2022.
IEEE
[1]
Z. Liu, G. Muliuk, J. Zhang, G. Roelkens, N. Le Thomas, and R. Baets, “Micro-transfer printed silicon nitride grating couplers for efficient on-chip light coupling,” in Integrated optics : devices, materials, and technologies XXVI, San Francisco, California, United States, 2022, vol. 12004.
@inproceedings{8746744,
  abstract     = {{We demonstrate a new post-processing approach to efficiently couple light in silicon nitride (Si3N4) photonic integrated circuits (PIC) via grating couplers. Thin-film coupons of apodised Si3N4 grating couplers functionalized with metallic bottom reflectors and adiabatic couplers are micro-transfer printed onto the input and output of Si3N4 waveguides, providing efficient coupling without jeopardizing the rest of the PIC. Two-dimensional FDTD simulations predict coupling efficiencies as large as 70% (-1.5dB) at a wavelength of 785nm. As a proof-of-concept, we report an experimental coupling efficiency of -4.6dB, which is 2.6dB better than the values obtained with standard designs of grating couplers.}},
  articleno    = {{1200404}},
  author       = {{Liu, Zuyang and Muliuk, Grigorij and Zhang, Jing and Roelkens, Günther and Le Thomas, Nicolas and Baets, Roel}},
  booktitle    = {{Integrated optics : devices, materials, and technologies XXVI}},
  editor       = {{García-Blanco, Sonia M. and Cheben, Pavel}},
  isbn         = {{9781510648791}},
  issn         = {{0277-786X}},
  keywords     = {{Micro-transfer printing,grating coupler,silicon nitride}},
  language     = {{eng}},
  location     = {{San Francisco, California, United States}},
  pages        = {{5}},
  publisher    = {{SPIE}},
  title        = {{Micro-transfer printed silicon nitride grating couplers for efficient on-chip light coupling}},
  url          = {{http://doi.org/10.1117/12.2626309}},
  volume       = {{12004}},
  year         = {{2022}},
}

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