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Thermo-mechanical noise measurement of sealed nanobeams on a silicon photonics-MEMS platform

Khannan Rajendran (UGent) , Awanish Pandey (UGent) , P. Edinger, G. Jo, Alain Yuji Takabayashi, Umar Khan (UGent) , Peter Verheyen, Niels Quack, Frank Niklaus, Wim Bogaerts (UGent) , et al.
(2021) 2021 IEEE 17th International Conference on Group IV Photonics (GFP). In IEEE International Conference on Group IV Photonics
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Abstract
The thermal motion of a vacuum packaged, sus-pended nano-beam and nanophotonic waveguide on a silicon photonics-MEMS platform is measured. The resonance frequency and Q-factor of the observed mechanical modes are determined. We also experimentally estimate the displacement sensitivity to be 1.779±0.022fmHz√
Keywords
OPTICAL FORCES

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MLA
Rajendran, Khannan, et al. “Thermo-Mechanical Noise Measurement of Sealed Nanobeams on a Silicon Photonics-MEMS Platform.” 2021 IEEE 17th International Conference on Group IV Photonics (GFP), IEEE, 2021, doi:10.1109/GFP51802.2021.9673877.
APA
Rajendran, K., Pandey, A., Edinger, P., Jo, G., Takabayashi, A. Y., Khan, U., … Van Thourhout, D. (2021). Thermo-mechanical noise measurement of sealed nanobeams on a silicon photonics-MEMS platform. 2021 IEEE 17th International Conference on Group IV Photonics (GFP). Presented at the 2021 IEEE 17th International Conference on Group IV Photonics (GFP), Malaga, Spain (virtual conference). https://doi.org/10.1109/GFP51802.2021.9673877
Chicago author-date
Rajendran, Khannan, Awanish Pandey, P. Edinger, G. Jo, Alain Yuji Takabayashi, Umar Khan, Peter Verheyen, et al. 2021. “Thermo-Mechanical Noise Measurement of Sealed Nanobeams on a Silicon Photonics-MEMS Platform.” In 2021 IEEE 17th International Conference on Group IV Photonics (GFP). IEEE. https://doi.org/10.1109/GFP51802.2021.9673877.
Chicago author-date (all authors)
Rajendran, Khannan, Awanish Pandey, P. Edinger, G. Jo, Alain Yuji Takabayashi, Umar Khan, Peter Verheyen, Niels Quack, Frank Niklaus, Wim Bogaerts, K. Gylfason, and Dries Van Thourhout. 2021. “Thermo-Mechanical Noise Measurement of Sealed Nanobeams on a Silicon Photonics-MEMS Platform.” In 2021 IEEE 17th International Conference on Group IV Photonics (GFP). IEEE. doi:10.1109/GFP51802.2021.9673877.
Vancouver
1.
Rajendran K, Pandey A, Edinger P, Jo G, Takabayashi AY, Khan U, et al. Thermo-mechanical noise measurement of sealed nanobeams on a silicon photonics-MEMS platform. In: 2021 IEEE 17th International Conference on Group IV Photonics (GFP). IEEE; 2021.
IEEE
[1]
K. Rajendran et al., “Thermo-mechanical noise measurement of sealed nanobeams on a silicon photonics-MEMS platform,” in 2021 IEEE 17th International Conference on Group IV Photonics (GFP), Malaga, Spain (virtual conference), 2021.
@inproceedings{8738848,
  abstract     = {{The thermal motion of a vacuum packaged, sus-pended nano-beam and nanophotonic waveguide on a silicon photonics-MEMS platform is measured. The resonance frequency and Q-factor of the observed mechanical modes are determined. We also experimentally estimate the displacement sensitivity to be 1.779±0.022fmHz√}},
  author       = {{Rajendran, Khannan and Pandey, Awanish and Edinger, P. and Jo, G. and Takabayashi, Alain Yuji and Khan, Umar and Verheyen, Peter and Quack, Niels and Niklaus, Frank and Bogaerts, Wim and Gylfason, K. and Van Thourhout, Dries}},
  booktitle    = {{2021 IEEE 17th International Conference on Group IV Photonics (GFP)}},
  isbn         = {{9781665422246}},
  issn         = {{1949-2081}},
  keywords     = {{OPTICAL FORCES}},
  language     = {{eng}},
  location     = {{Malaga, Spain (virtual conference)}},
  pages        = {{2}},
  publisher    = {{IEEE}},
  title        = {{Thermo-mechanical noise measurement of sealed nanobeams on a silicon photonics-MEMS platform}},
  url          = {{http://doi.org/10.1109/GFP51802.2021.9673877}},
  year         = {{2021}},
}
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