Plasma-enhanced atomic layer deposition of nickel and cobalt phosphate for lithium ion batteries
- Author
- Lowie Henderick (UGent) , Ruben Blomme (UGent) , Matthias Minjauw (UGent) , Jonas Keukelier (UGent) , Johan Meersschaut, Jolien Dendooven (UGent) , Philippe Vereecken and Christophe Detavernier (UGent)
- Organization
- Project
-
- Making Nanomaterials Work
- XL-Lion: Advanced lithium ion batteries with dual ionic-electronic conducting core-shell particles
- An in situ investigation of the surface chemistry during the nucleation and growth of cobalt and nickel using atomic layer deposition
- A fundamental study of nucleation and growth during thermal and plasma-enhanced atomic layer deposition of noble metals using in situ synchtron-based characterization techniques.
- Abstract
- A plasma-enhanced ALD process has been developed to deposit nickel phosphate. The process combines trimethylphosphate (TMP) plasma with oxygen plasma and nickelocene at a substrate temperature of 300 degrees C. Saturation at a growth per cycle of approximately 0.2 nm per cycle is observed for both the TMP plasma and nickelocene, while a continuous decrease in the growth per cycle is found for the oxygen plasma. From ERD, a stoichiometry of Ni-3(P0.8O3.1)(2) is measured, but by adding additional oxygen plasma after nickelocene, the composition of Ni-3(P0.9O3.7)(2) becomes even closer to stoichiometric Ni-3(PO4)(2). The as-deposited layer resulting from the process without the additional oxygen plasma is amorphous but can be crystallized into Ni2P or crystalline Ni-3(PO4)(2) by annealing under a hydrogen or helium atmosphere, respectively. The layer deposited with the additional oxygen plasma shows two X-ray diffraction peaks indicating the formation of crystalline Ni-3(PO4)(2) already during the deposition. The resulting PE-ALD deposited nickel phosphate layers were then electrochemically studied and compared to PE-ALD cobalt and iron phosphate. All phosphates need electrochemical activation at low potential first, after which reversible redox reactions are observed at a potential of approximately 2.5 V vs. Li+/Li. A relatively high capacity and good rate behavior are observed for both nickel and cobalt phosphate, which are thought to originate from either a conversion type reaction or an alloying reaction.
- Keywords
- Inorganic Chemistry, CYCLING PERFORMANCE, ALUMINUM PHOSPHATE, THIN-FILM, VOLTAGE, STABILITY, OXIDATION, ELECTRODE, COATINGS, IRON, NI
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Citation
Please use this url to cite or link to this publication: http://hdl.handle.net/1854/LU-8736583
- MLA
- Henderick, Lowie, et al. “Plasma-Enhanced Atomic Layer Deposition of Nickel and Cobalt Phosphate for Lithium Ion Batteries.” DALTON TRANSACTIONS, vol. 51, no. 5, 2022, pp. 2059–67, doi:10.1039/d1dt03417k.
- APA
- Henderick, L., Blomme, R., Minjauw, M., Keukelier, J., Meersschaut, J., Dendooven, J., … Detavernier, C. (2022). Plasma-enhanced atomic layer deposition of nickel and cobalt phosphate for lithium ion batteries. DALTON TRANSACTIONS, 51(5), 2059–2067. https://doi.org/10.1039/d1dt03417k
- Chicago author-date
- Henderick, Lowie, Ruben Blomme, Matthias Minjauw, Jonas Keukelier, Johan Meersschaut, Jolien Dendooven, Philippe Vereecken, and Christophe Detavernier. 2022. “Plasma-Enhanced Atomic Layer Deposition of Nickel and Cobalt Phosphate for Lithium Ion Batteries.” DALTON TRANSACTIONS 51 (5): 2059–67. https://doi.org/10.1039/d1dt03417k.
- Chicago author-date (all authors)
- Henderick, Lowie, Ruben Blomme, Matthias Minjauw, Jonas Keukelier, Johan Meersschaut, Jolien Dendooven, Philippe Vereecken, and Christophe Detavernier. 2022. “Plasma-Enhanced Atomic Layer Deposition of Nickel and Cobalt Phosphate for Lithium Ion Batteries.” DALTON TRANSACTIONS 51 (5): 2059–2067. doi:10.1039/d1dt03417k.
- Vancouver
- 1.Henderick L, Blomme R, Minjauw M, Keukelier J, Meersschaut J, Dendooven J, et al. Plasma-enhanced atomic layer deposition of nickel and cobalt phosphate for lithium ion batteries. DALTON TRANSACTIONS. 2022;51(5):2059–67.
- IEEE
- [1]L. Henderick et al., “Plasma-enhanced atomic layer deposition of nickel and cobalt phosphate for lithium ion batteries,” DALTON TRANSACTIONS, vol. 51, no. 5, pp. 2059–2067, 2022.
@article{8736583,
abstract = {{A plasma-enhanced ALD process has been developed to deposit nickel phosphate. The process combines trimethylphosphate (TMP) plasma with oxygen plasma and nickelocene at a substrate temperature of 300 degrees C. Saturation at a growth per cycle of approximately 0.2 nm per cycle is observed for both the TMP plasma and nickelocene, while a continuous decrease in the growth per cycle is found for the oxygen plasma. From ERD, a stoichiometry of Ni-3(P0.8O3.1)(2) is measured, but by adding additional oxygen plasma after nickelocene, the composition of Ni-3(P0.9O3.7)(2) becomes even closer to stoichiometric Ni-3(PO4)(2). The as-deposited layer resulting from the process without the additional oxygen plasma is amorphous but can be crystallized into Ni2P or crystalline Ni-3(PO4)(2) by annealing under a hydrogen or helium atmosphere, respectively. The layer deposited with the additional oxygen plasma shows two X-ray diffraction peaks indicating the formation of crystalline Ni-3(PO4)(2) already during the deposition. The resulting PE-ALD deposited nickel phosphate layers were then electrochemically studied and compared to PE-ALD cobalt and iron phosphate. All phosphates need electrochemical activation at low potential first, after which reversible redox reactions are observed at a potential of approximately 2.5 V vs. Li+/Li. A relatively high capacity and good rate behavior are observed for both nickel and cobalt phosphate, which are thought to originate from either a conversion type reaction or an alloying reaction.}},
author = {{Henderick, Lowie and Blomme, Ruben and Minjauw, Matthias and Keukelier, Jonas and Meersschaut, Johan and Dendooven, Jolien and Vereecken, Philippe and Detavernier, Christophe}},
issn = {{1477-9226}},
journal = {{DALTON TRANSACTIONS}},
keywords = {{Inorganic Chemistry,CYCLING PERFORMANCE,ALUMINUM PHOSPHATE,THIN-FILM,VOLTAGE,STABILITY,OXIDATION,ELECTRODE,COATINGS,IRON,NI}},
language = {{eng}},
number = {{5}},
pages = {{2059--2067}},
title = {{Plasma-enhanced atomic layer deposition of nickel and cobalt phosphate for lithium ion batteries}},
url = {{http://doi.org/10.1039/d1dt03417k}},
volume = {{51}},
year = {{2022}},
}
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