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High-Q THz photonic crystal cavity on a low-Loss suspended silicon platform

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Abstract
In this article, we present an ultrahigh-Q cavity at terahertz (THz) frequencies. The designed cavity is built on a low-loss suspended silicon (Si) waveguide. The substrate removal under the waveguide and the use of optimized deep reactive ion etching processing are the main reasons for observing very low losses of this design alpha < 0.09 dB/mm. This very low-loss behavior of this designed platform is also demonstrated by the measurement of a one-dimensional photonic wire crystal cavity with Q > 18000. Different cavity layouts are adjusted in order to maximize the transmittance while maintaining high Q. A design with reduced number of etched crystal holes achieve Q > 1500 and high transmittance T > 70%. These structures are presented at sub-mm waves (around 600 GHz) for the design of a gas sensor in this frequency region, but the principles can be scaled and redesigned for other frequencies in the THz band.
Keywords
Electrical and Electronic Engineering, Radiation, SiliconCavity resonatorsOptical lossesPhotonic crystalsLoss measurementRefractive indexIndexesHigh-resistivity silicon (HR-Si)propagation lossesterahertz (THz) waveguideTHz photonic crystal (PhC) cavityquality factor

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Citation

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MLA
Akiki, Elias, et al. “High-Q THz Photonic Crystal Cavity on a Low-Loss Suspended Silicon Platform.” IEEE TRANSACTIONS ON TERAHERTZ SCIENCE AND TECHNOLOGY, vol. 11, no. 1, 2021, pp. 42–53, doi:10.1109/tthz.2020.3019928.
APA
Akiki, E., Verstuyft, M., Kuyken, B., Walter, B., Faucher, M., Lampin, J.-F., … Vanwolleghem, M. (2021). High-Q THz photonic crystal cavity on a low-Loss suspended silicon platform. IEEE TRANSACTIONS ON TERAHERTZ SCIENCE AND TECHNOLOGY, 11(1), 42–53. https://doi.org/10.1109/tthz.2020.3019928
Chicago author-date
Akiki, Elias, Mattias Verstuyft, Bart Kuyken, Benjamin Walter, Marc Faucher, Jean-Francois Lampin, Guillaume Ducournau, and Mathias Vanwolleghem. 2021. “High-Q THz Photonic Crystal Cavity on a Low-Loss Suspended Silicon Platform.” IEEE TRANSACTIONS ON TERAHERTZ SCIENCE AND TECHNOLOGY 11 (1): 42–53. https://doi.org/10.1109/tthz.2020.3019928.
Chicago author-date (all authors)
Akiki, Elias, Mattias Verstuyft, Bart Kuyken, Benjamin Walter, Marc Faucher, Jean-Francois Lampin, Guillaume Ducournau, and Mathias Vanwolleghem. 2021. “High-Q THz Photonic Crystal Cavity on a Low-Loss Suspended Silicon Platform.” IEEE TRANSACTIONS ON TERAHERTZ SCIENCE AND TECHNOLOGY 11 (1): 42–53. doi:10.1109/tthz.2020.3019928.
Vancouver
1.
Akiki E, Verstuyft M, Kuyken B, Walter B, Faucher M, Lampin J-F, et al. High-Q THz photonic crystal cavity on a low-Loss suspended silicon platform. IEEE TRANSACTIONS ON TERAHERTZ SCIENCE AND TECHNOLOGY. 2021;11(1):42–53.
IEEE
[1]
E. Akiki et al., “High-Q THz photonic crystal cavity on a low-Loss suspended silicon platform,” IEEE TRANSACTIONS ON TERAHERTZ SCIENCE AND TECHNOLOGY, vol. 11, no. 1, pp. 42–53, 2021.
@article{8713970,
  abstract     = {{In this article, we present an ultrahigh-Q cavity at terahertz (THz) frequencies. The designed cavity is built on a low-loss suspended silicon (Si) waveguide. The substrate removal under the waveguide and the use of optimized deep reactive ion etching processing are the main reasons for observing very low losses of this design alpha < 0.09 dB/mm. This very low-loss behavior of this designed platform is also demonstrated by the measurement of a one-dimensional photonic wire crystal cavity with Q > 18000. Different cavity layouts are adjusted in order to maximize the transmittance while maintaining high Q. A design with reduced number of etched crystal holes achieve Q > 1500 and high transmittance T > 70%. These structures are presented at sub-mm waves (around 600 GHz) for the design of a gas sensor in this frequency region, but the principles can be scaled and redesigned for other frequencies in the THz band.}},
  author       = {{Akiki, Elias and Verstuyft, Mattias and Kuyken, Bart and Walter, Benjamin and Faucher, Marc and Lampin, Jean-Francois and Ducournau, Guillaume and Vanwolleghem, Mathias}},
  issn         = {{2156-342X}},
  journal      = {{IEEE TRANSACTIONS ON TERAHERTZ SCIENCE AND TECHNOLOGY}},
  keywords     = {{Electrical and Electronic Engineering,Radiation,SiliconCavity resonatorsOptical lossesPhotonic crystalsLoss measurementRefractive indexIndexesHigh-resistivity silicon (HR-Si)propagation lossesterahertz (THz) waveguideTHz photonic crystal (PhC) cavityquality factor}},
  language     = {{eng}},
  number       = {{1}},
  pages        = {{42--53}},
  title        = {{High-Q THz photonic crystal cavity on a low-Loss suspended silicon platform}},
  url          = {{http://dx.doi.org/10.1109/tthz.2020.3019928}},
  volume       = {{11}},
  year         = {{2021}},
}

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