@article{8703661,
  abstract     = {{The use of Ti phosphate as a functional coating for Li ion battery electrodes has been investigated, as well as the effect of nitrogen doping on its electrochemical properties. First, previous knowledge on PE-ALD of Ti phosphate (using an exposure sequence of trimethylphosphate plasma–oxygen plasma–titaniumisopropoxide) was used to study an altered process using a nitrogen plasma, i.e. TMP* - N2* - TTIP. This enabled the deposition of a nitrogen doped (6 at.%) Ti phosphate with a growth per cycle of 0.4 nm/cycle. Next, a dual-source precursor (diethylphosphoramidate plasma, or DEPA*) was introduced instead of TMP*, allowing for a higher growth rate (0.6 nm/cycle) and a higher nitrogen level (8.6 at.%). The ionic transparency of the phosphate slightly decreased due to nitrogen incorporation, but the effective transversal electronic conductivity showed to be three times higher after nitrogen doping. A 2 nm coating of (un)doped Ti phosphate significantly improved the rate capability of a lithium nickel manganese cobalt oxide (NMC) electrode, increasing the amount of energy that can be stored at high (dis)charging speeds with a factor 10 (at 5C). In addition, the undoped titanium phosphate coating offered increased stability, retaining 84% of the capacity after 100 cycles at 1C with respect to 79% for the uncoated electrode.}},
  articleno    = {{229866}},
  author       = {{Henderick, Lowie and Hamed, Hamid and Mattelaer, Felix and Minjauw, Matthias and Nisula, Mikko and Meersschaut, Johan and Dendooven, Jolien and Safari, Mohammadhosein and Vereecken, Philippe and Detavernier, Christophe}},
  issn         = {{0378-7753}},
  journal      = {{JOURNAL OF POWER SOURCES}},
  keywords     = {{Physical and Theoretical Chemistry,Renewable Energy,Sustainability and the Environment,Electrical and Electronic Engineering,Energy Engineering and Power Technology,Atomic layer deposition,Plasma-enhanced deposition,Nitrogen doping,Titanium phosphate,Lithium-ion battery,Functional coating  KeyWords Plus:CATHODE MATERIALS,TITANIUM PHOSPHATE,CONDUCTIVITY}},
  language     = {{eng}},
  pages        = {{11}},
  title        = {{Plasma enhanced atomic layer deposition of a (nitrogen doped) Ti phosphate coating for improved energy storage in Li-ion batteries}},
  url          = {{http://doi.org/10.1016/j.jpowsour.2021.229866}},
  volume       = {{497}},
  year         = {{2021}},
}

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