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Tuning size and coverage of Pd nanoparticles using atomic layer deposition

Ji-Yu Feng, Ranjith Karuparambil Ramachandran (UGent) , Eduardo Solano Minuesa (UGent) , Matthias Minjauw (UGent) , Michiel Van Daele, Andre Vantomme, Daniel Hermida-Merino, Alessandro Coati, Hilde Poelman (UGent) , Christophe Detavernier (UGent) , et al.
(2021) APPLIED SURFACE SCIENCE. 539.
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Abstract
The morphology evolution of supported palladium nanoparticles (Pd NPs) during plasma-enhanced atomic layer deposition using palladium hexafluoroacetylacetonate (Pd(hfac)(2)) as precursor was investigated using in situ and ex situ X-ray fluorescence (XRF) and grazing incidence small angle X-ray scattering (GISAXS), as well as ex situ scanning electron microscopy (SEM). The initial areal density of Pd NPs increases through adding cycles of the three-step process using Pd(hfac)(2), H-2 plasma and trimethylaluminum (TMA) prior to the standard Pd(hfac)(2) + H-2 plasma process. The participation of an O-2 plasma exposure as additional co-reactant before or after the H-2 plasma step also plays a role in the nucleation density and particle coalescence, affecting also the shape of the deposited particles. Based on the gathered knowledge, a synthetic approach that enables precise control of the Pd nanoparticle dimensions and coverage is developed.
Keywords
Palladium, Supported metal nanoparticles, Atomic layer deposition, Particle morphology, Well-designed catalysts, NOBLE-METALS, PALLADIUM NANOPARTICLES, PLATINUM NANOPARTICLES, OXIDATION, HYDROGEN, FILMS, DEHYDROGENATION, PARTICLES, CATALYSIS, KINETICS

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MLA
Feng, Ji-Yu, et al. “Tuning Size and Coverage of Pd Nanoparticles Using Atomic Layer Deposition.” APPLIED SURFACE SCIENCE, vol. 539, 2021, doi:10.1016/j.apsusc.2020.148238.
APA
Feng, J.-Y., Karuparambil Ramachandran, R., Solano Minuesa, E., Minjauw, M., Van Daele, M., Vantomme, A., … Dendooven, J. (2021). Tuning size and coverage of Pd nanoparticles using atomic layer deposition. APPLIED SURFACE SCIENCE, 539. https://doi.org/10.1016/j.apsusc.2020.148238
Chicago author-date
Feng, Ji-Yu, Ranjith Karuparambil Ramachandran, Eduardo Solano Minuesa, Matthias Minjauw, Michiel Van Daele, Andre Vantomme, Daniel Hermida-Merino, et al. 2021. “Tuning Size and Coverage of Pd Nanoparticles Using Atomic Layer Deposition.” APPLIED SURFACE SCIENCE 539. https://doi.org/10.1016/j.apsusc.2020.148238.
Chicago author-date (all authors)
Feng, Ji-Yu, Ranjith Karuparambil Ramachandran, Eduardo Solano Minuesa, Matthias Minjauw, Michiel Van Daele, Andre Vantomme, Daniel Hermida-Merino, Alessandro Coati, Hilde Poelman, Christophe Detavernier, and Jolien Dendooven. 2021. “Tuning Size and Coverage of Pd Nanoparticles Using Atomic Layer Deposition.” APPLIED SURFACE SCIENCE 539. doi:10.1016/j.apsusc.2020.148238.
Vancouver
1.
Feng J-Y, Karuparambil Ramachandran R, Solano Minuesa E, Minjauw M, Van Daele M, Vantomme A, et al. Tuning size and coverage of Pd nanoparticles using atomic layer deposition. APPLIED SURFACE SCIENCE. 2021;539.
IEEE
[1]
J.-Y. Feng et al., “Tuning size and coverage of Pd nanoparticles using atomic layer deposition,” APPLIED SURFACE SCIENCE, vol. 539, 2021.
@article{8690476,
  abstract     = {{The morphology evolution of supported palladium nanoparticles (Pd NPs) during plasma-enhanced atomic layer deposition using palladium hexafluoroacetylacetonate (Pd(hfac)(2)) as precursor was investigated using in situ and ex situ X-ray fluorescence (XRF) and grazing incidence small angle X-ray scattering (GISAXS), as well as ex situ scanning electron microscopy (SEM). The initial areal density of Pd NPs increases through adding cycles of the three-step process using Pd(hfac)(2), H-2 plasma and trimethylaluminum (TMA) prior to the standard Pd(hfac)(2) + H-2 plasma process. The participation of an O-2 plasma exposure as additional co-reactant before or after the H-2 plasma step also plays a role in the nucleation density and particle coalescence, affecting also the shape of the deposited particles. Based on the gathered knowledge, a synthetic approach that enables precise control of the Pd nanoparticle dimensions and coverage is developed.}},
  articleno    = {{148238}},
  author       = {{Feng, Ji-Yu and Karuparambil Ramachandran, Ranjith and Solano Minuesa, Eduardo and Minjauw, Matthias and Van Daele, Michiel and Vantomme, Andre and Hermida-Merino, Daniel and Coati, Alessandro and Poelman, Hilde and Detavernier, Christophe and Dendooven, Jolien}},
  issn         = {{0169-4332}},
  journal      = {{APPLIED SURFACE SCIENCE}},
  keywords     = {{Palladium,Supported metal nanoparticles,Atomic layer deposition,Particle morphology,Well-designed catalysts,NOBLE-METALS,PALLADIUM NANOPARTICLES,PLATINUM NANOPARTICLES,OXIDATION,HYDROGEN,FILMS,DEHYDROGENATION,PARTICLES,CATALYSIS,KINETICS}},
  language     = {{eng}},
  pages        = {{14}},
  title        = {{Tuning size and coverage of Pd nanoparticles using atomic layer deposition}},
  url          = {{http://doi.org/10.1016/j.apsusc.2020.148238}},
  volume       = {{539}},
  year         = {{2021}},
}
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