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Study of ALD barrier layers for the embedding of electronic and opto-electronic components in a smart microsystem in direct contact with the human body

Celine Vanhaverbeke (UGent)
(2020)
Author
Promoter
(UGent) and (UGent)
Organization
Keywords
ALD, pinhole detection, packaging, medical, implant

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Citation

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MLA
Vanhaverbeke, Celine. Study of ALD Barrier Layers for the Embedding of Electronic and Opto-Electronic Components in a Smart Microsystem in Direct Contact with the Human Body. Universiteit Gent. Faculteit Ingenieurswetenschappen en Architectuur, 2020.
APA
Vanhaverbeke, C. (2020). Study of ALD barrier layers for the embedding of electronic and opto-electronic components in a smart microsystem in direct contact with the human body. Universiteit Gent. Faculteit Ingenieurswetenschappen en Architectuur.
Chicago author-date
Vanhaverbeke, Celine. 2020. “Study of ALD Barrier Layers for the Embedding of Electronic and Opto-Electronic Components in a Smart Microsystem in Direct Contact with the Human Body.” Universiteit Gent. Faculteit Ingenieurswetenschappen en Architectuur.
Chicago author-date (all authors)
Vanhaverbeke, Celine. 2020. “Study of ALD Barrier Layers for the Embedding of Electronic and Opto-Electronic Components in a Smart Microsystem in Direct Contact with the Human Body.” Universiteit Gent. Faculteit Ingenieurswetenschappen en Architectuur.
Vancouver
1.
Vanhaverbeke C. Study of ALD barrier layers for the embedding of electronic and opto-electronic components in a smart microsystem in direct contact with the human body. Universiteit Gent. Faculteit Ingenieurswetenschappen en Architectuur; 2020.
IEEE
[1]
C. Vanhaverbeke, “Study of ALD barrier layers for the embedding of electronic and opto-electronic components in a smart microsystem in direct contact with the human body,” Universiteit Gent. Faculteit Ingenieurswetenschappen en Architectuur, 2020.
@phdthesis{8670116,
  author       = {{Vanhaverbeke, Celine}},
  isbn         = {{9789463553810}},
  keywords     = {{ALD,pinhole detection,packaging,medical,implant}},
  language     = {{eng}},
  pages        = {{xxvii, 127}},
  publisher    = {{Universiteit Gent. Faculteit Ingenieurswetenschappen en Architectuur}},
  school       = {{Ghent University}},
  title        = {{Study of ALD barrier layers for the embedding of electronic and opto-electronic components in a smart microsystem in direct contact with the human body}},
  year         = {{2020}},
}