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Imprinted polymer-based guided mode resonance grating strain sensors

Marie-Aline Mattelin (UGent) , Jeroen Missinne (UGent) , Bert De Coensel (UGent) and Geert Van Steenberge (UGent)
(2020) SENSORS. 20(11).
Author
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Abstract
Optical sensors based on guided mode resonance (GMR) realized in polymers are promising candidates for sensitive and cost effective strain sensors. The benefit of GMR grating sensors is the non-contact, easy optical read-out with large working distance, avoiding costly alignment and packaging procedures. The GMR gratings with resonance around 850–900 nm are fabricated using electron beam lithography and replicated using a soft stamp based imprinting technique on 175 μm-thick foils to make them suitable for optical strain sensing. For the strain measurements, foils are realized with both GMR gratings and waveguides with Bragg gratings. The latter are used as reference sensors and allow extracting the absolute strain sensitivity of the GMR sensor foils. Following this method, it is shown that GMR gratings have an absolute strain sensitivity of 1.02 ± 0.05 pm / με at 870 nm.
Keywords
Guided mode resonance grating sensor, waveguide Bragg grating sensor, flexible strain sensor, temperature sensor, polymer foil, Ormocer®, epoxy, electron beam lithography, ultraviolet nanoimprint lithography, REFLECTANCE FILTERS, REFRACTIVE-INDEX, SENSITIVITY, PERFORMANCE, STEP

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Citation

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MLA
Mattelin, Marie-Aline, et al. “Imprinted Polymer-Based Guided Mode Resonance Grating Strain Sensors.” SENSORS, vol. 20, no. 11, 2020, doi:10.3390/s20113221.
APA
Mattelin, M.-A., Missinne, J., De Coensel, B., & Van Steenberge, G. (2020). Imprinted polymer-based guided mode resonance grating strain sensors. SENSORS, 20(11). https://doi.org/10.3390/s20113221
Chicago author-date
Mattelin, Marie-Aline, Jeroen Missinne, Bert De Coensel, and Geert Van Steenberge. 2020. “Imprinted Polymer-Based Guided Mode Resonance Grating Strain Sensors.” SENSORS 20 (11). https://doi.org/10.3390/s20113221.
Chicago author-date (all authors)
Mattelin, Marie-Aline, Jeroen Missinne, Bert De Coensel, and Geert Van Steenberge. 2020. “Imprinted Polymer-Based Guided Mode Resonance Grating Strain Sensors.” SENSORS 20 (11). doi:10.3390/s20113221.
Vancouver
1.
Mattelin M-A, Missinne J, De Coensel B, Van Steenberge G. Imprinted polymer-based guided mode resonance grating strain sensors. SENSORS. 2020;20(11).
IEEE
[1]
M.-A. Mattelin, J. Missinne, B. De Coensel, and G. Van Steenberge, “Imprinted polymer-based guided mode resonance grating strain sensors,” SENSORS, vol. 20, no. 11, 2020.
@article{8665384,
  abstract     = {{Optical sensors based on guided mode resonance (GMR) realized in polymers are promising candidates for sensitive and cost effective strain sensors. The benefit of GMR grating sensors is the non-contact, easy optical read-out with large working distance, avoiding costly alignment and packaging procedures. The GMR gratings with resonance around 850–900 nm are fabricated using electron beam lithography and replicated using a soft stamp based imprinting technique on 175 μm-thick foils to make them suitable for optical strain sensing. For the strain measurements, foils are realized with both GMR gratings and waveguides with Bragg gratings. The latter are used as reference sensors and allow extracting the absolute strain sensitivity of the GMR sensor foils. Following this method, it is shown that GMR gratings have an absolute strain sensitivity of 1.02 ± 0.05 pm / με at 870 nm.}},
  articleno    = {{3221}},
  author       = {{Mattelin, Marie-Aline and Missinne, Jeroen and De Coensel, Bert and Van Steenberge, Geert}},
  issn         = {{1424-8220}},
  journal      = {{SENSORS}},
  keywords     = {{Guided mode resonance grating sensor,waveguide Bragg grating sensor,flexible strain sensor,temperature sensor,polymer foil,Ormocer®,epoxy,electron beam lithography,ultraviolet nanoimprint lithography,REFLECTANCE FILTERS,REFRACTIVE-INDEX,SENSITIVITY,PERFORMANCE,STEP}},
  language     = {{eng}},
  number       = {{11}},
  pages        = {{24}},
  title        = {{Imprinted polymer-based guided mode resonance grating strain sensors}},
  url          = {{http://dx.doi.org/10.3390/s20113221}},
  volume       = {{20}},
  year         = {{2020}},
}
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