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Abstract
We propose an electrical evaluation technique named differential charge pumping (Δ-CP) to extract information on the interface states (D it ) at the SiC/SiO 2 interface. This technique allows to obtain information on (1) the physical location of the D it ; (2) the energetic spread of the D it in the bandgap; (3) if the D it are donor or acceptor type. First results indicate contributions from both the “S/D” region and the channel regions to the overall CP signal. Surprisingly a substantial contribution of the “S/D” regions of the transistors to the overall CP signal is observed. In the channel region, both donors and acceptor type states are identified, the majority being acceptor type.
Keywords
SiC, interface states, charge pumping, donor, acceptor states

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MLA
Moens, P., et al. “Differential Variable Base Charge Pumping (Delta-CP) for SiO2/SiC Interface Characterization.” 2019 31st International Symposium on Power Semiconductor Devices and ICs (ISPSD), IEEE, 2019, pp. 163–66, doi:10.1109/ispsd.2019.8757560.
APA
Moens, P., Constant, A., Stockman, A., Franchi, J., & Allerstam, F. (2019). Differential variable base charge pumping (Delta-CP) for SiO2/SiC interface characterization. 2019 31st International Symposium on Power Semiconductor Devices and ICs (ISPSD), 163–166. https://doi.org/10.1109/ispsd.2019.8757560
Chicago author-date
Moens, P., A. Constant, Arno Stockman, J. Franchi, and F. Allerstam. 2019. “Differential Variable Base Charge Pumping (Delta-CP) for SiO2/SiC Interface Characterization.” In 2019 31st International Symposium on Power Semiconductor Devices and ICs (ISPSD), 163–66. New York: IEEE. https://doi.org/10.1109/ispsd.2019.8757560.
Chicago author-date (all authors)
Moens, P., A. Constant, Arno Stockman, J. Franchi, and F. Allerstam. 2019. “Differential Variable Base Charge Pumping (Delta-CP) for SiO2/SiC Interface Characterization.” In 2019 31st International Symposium on Power Semiconductor Devices and ICs (ISPSD), 163–166. New York: IEEE. doi:10.1109/ispsd.2019.8757560.
Vancouver
1.
Moens P, Constant A, Stockman A, Franchi J, Allerstam F. Differential variable base charge pumping (Delta-CP) for SiO2/SiC interface characterization. In: 2019 31st International Symposium on Power Semiconductor Devices and ICs (ISPSD). New York: IEEE; 2019. p. 163–6.
IEEE
[1]
P. Moens, A. Constant, A. Stockman, J. Franchi, and F. Allerstam, “Differential variable base charge pumping (Delta-CP) for SiO2/SiC interface characterization,” in 2019 31st International Symposium on Power Semiconductor Devices and ICs (ISPSD), Shanghai, China, 2019, pp. 163–166.
@inproceedings{8652943,
  abstract     = {{We propose an electrical evaluation technique named differential charge pumping (Δ-CP) to extract information on the interface states (D it ) at the SiC/SiO 2 interface. This technique allows to obtain information on (1) the physical location of the D it ; (2) the energetic spread of the D it in the bandgap; (3) if the D it are donor or acceptor type. First results indicate contributions from both the “S/D” region and the channel regions to the overall CP signal. Surprisingly a substantial contribution of the “S/D” regions of the transistors to the overall CP signal is observed. In the channel region, both donors and acceptor type states are identified, the majority being acceptor type.}},
  author       = {{Moens, P. and Constant, A. and Stockman, Arno and Franchi, J. and Allerstam, F.}},
  booktitle    = {{2019 31st International Symposium on Power Semiconductor Devices and ICs (ISPSD)}},
  isbn         = {{9781728105802}},
  issn         = {{1063-6854}},
  keywords     = {{SiC,interface states,charge pumping,donor,acceptor states}},
  language     = {{eng}},
  location     = {{Shanghai, China}},
  pages        = {{163--166}},
  publisher    = {{IEEE}},
  title        = {{Differential variable base charge pumping (Delta-CP) for SiO2/SiC interface characterization}},
  url          = {{http://doi.org/10.1109/ispsd.2019.8757560}},
  year         = {{2019}},
}

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