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Nanoscale Au-ZnO heterostructure developed by atomic layer deposition towards amperometric H2O2 detection

Hongyan Xu, Zihan Wei (UGent) , Francis Verpoort (UGent) , Jie Hu and Serge Zhuiykov (UGent)
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Abstract
Nanoscale Au-ZnO heterostructures were fabricated on 4-in. SiO2/Si wafers by the atomic layer deposition (ALD) technique. Developed Au-ZnO heterostructures after post-deposition annealing at 250 degrees C were tested for amperometric hydrogen peroxide (H2O2) detection. The surface morphology and nanostructure of Au-ZnO heterostructures were examined by field emission scanning electron microscopy (FE-SEM), Raman spectroscopy, atomic force microscopy (AFM), X-ray photoelectron spectroscopy (XPS), etc. Additionally, the electrochemical behavior of Au-ZnO heterostructures towards H2O2 sensing under various conditions is assessed by chronoamperometry and electrochemical impedance spectroscopy (EIS). The results showed that ALD-fabricated Au-ZnO heterostructures exhibited one of the highest sensitivities of 0.53 mu A mu M(-1)cm(-2), the widest linear H2O2 detection range of 1.0 mu M-120mM, a low limit of detection (LOD) of 0.78 mu M, excellent selectivity under the normal operation conditions, and great long-term stability. Utilization of the ALD deposition method opens up a unique opportunity for the improvement of the various capabilities of the devices based on Au-ZnO heterostructures for amperometric detection of different chemicals.
Keywords
Au-ZnO, Heterostructures, H2O2, Atomic layer deposition, Amperometric detection, WAFER-SCALE FABRICATION, GAS SENSOR, THIN-FILM, NANOPARTICLES, AL, WO3, PHOTOLUMINESCENCE, PERFORMANCE, NANOFILMS, HYDRAZINE

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MLA
Xu, Hongyan, et al. “Nanoscale Au-ZnO Heterostructure Developed by Atomic Layer Deposition towards Amperometric H2O2 Detection.” NANOSCALE RESEARCH LETTERS, vol. 15, no. 1, 2020.
APA
Xu, H., Wei, Z., Verpoort, F., Hu, J., & Zhuiykov, S. (2020). Nanoscale Au-ZnO heterostructure developed by atomic layer deposition towards amperometric H2O2 detection. NANOSCALE RESEARCH LETTERS, 15(1).
Chicago author-date
Xu, Hongyan, Zihan Wei, Francis Verpoort, Jie Hu, and Serge Zhuiykov. 2020. “Nanoscale Au-ZnO Heterostructure Developed by Atomic Layer Deposition towards Amperometric H2O2 Detection.” NANOSCALE RESEARCH LETTERS 15 (1).
Chicago author-date (all authors)
Xu, Hongyan, Zihan Wei, Francis Verpoort, Jie Hu, and Serge Zhuiykov. 2020. “Nanoscale Au-ZnO Heterostructure Developed by Atomic Layer Deposition towards Amperometric H2O2 Detection.” NANOSCALE RESEARCH LETTERS 15 (1).
Vancouver
1.
Xu H, Wei Z, Verpoort F, Hu J, Zhuiykov S. Nanoscale Au-ZnO heterostructure developed by atomic layer deposition towards amperometric H2O2 detection. NANOSCALE RESEARCH LETTERS. 2020;15(1).
IEEE
[1]
H. Xu, Z. Wei, F. Verpoort, J. Hu, and S. Zhuiykov, “Nanoscale Au-ZnO heterostructure developed by atomic layer deposition towards amperometric H2O2 detection,” NANOSCALE RESEARCH LETTERS, vol. 15, no. 1, 2020.
@article{8648262,
  abstract     = {Nanoscale Au-ZnO heterostructures were fabricated on 4-in. SiO2/Si wafers by the atomic layer deposition (ALD) technique. Developed Au-ZnO heterostructures after post-deposition annealing at 250 degrees C were tested for amperometric hydrogen peroxide (H2O2) detection. The surface morphology and nanostructure of Au-ZnO heterostructures were examined by field emission scanning electron microscopy (FE-SEM), Raman spectroscopy, atomic force microscopy (AFM), X-ray photoelectron spectroscopy (XPS), etc. Additionally, the electrochemical behavior of Au-ZnO heterostructures towards H2O2 sensing under various conditions is assessed by chronoamperometry and electrochemical impedance spectroscopy (EIS). The results showed that ALD-fabricated Au-ZnO heterostructures exhibited one of the highest sensitivities of 0.53 mu A mu M(-1)cm(-2), the widest linear H2O2 detection range of 1.0 mu M-120mM, a low limit of detection (LOD) of 0.78 mu M, excellent selectivity under the normal operation conditions, and great long-term stability. Utilization of the ALD deposition method opens up a unique opportunity for the improvement of the various capabilities of the devices based on Au-ZnO heterostructures for amperometric detection of different chemicals.},
  articleno    = {41},
  author       = {Xu, Hongyan and Wei, Zihan and Verpoort, Francis and Hu, Jie and Zhuiykov, Serge},
  issn         = {1931-7573},
  journal      = {NANOSCALE RESEARCH LETTERS},
  keywords     = {Au-ZnO,Heterostructures,H2O2,Atomic layer deposition,Amperometric detection,WAFER-SCALE FABRICATION,GAS SENSOR,THIN-FILM,NANOPARTICLES,AL,WO3,PHOTOLUMINESCENCE,PERFORMANCE,NANOFILMS,HYDRAZINE},
  language     = {eng},
  number       = {1},
  pages        = {14},
  title        = {Nanoscale Au-ZnO heterostructure developed by atomic layer deposition towards amperometric H2O2 detection},
  url          = {http://dx.doi.org/10.1186/s11671-020-3273-7},
  volume       = {15},
  year         = {2020},
}

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