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A monolithic low-power-consumption driver circuit based on a Dickson charge pump for MEMS actuator applications

Hui Peng (UGent) , Herbert De Pauw (UGent) , Pieter Bauwens (UGent) and Jan Doutreloigne (UGent)
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Abstract
This paper introduces a monolithic high-voltage driver circuit for use in MEMS applications. The proposed design offers an output voltage which can linearly sweep from 0 V to 72.8 V under zero-load conditions. To minimize the power consumption of the driver circuit, an advanced charge recycling strategy and finger capacitor structure are implemented in the Dickson charge pump which acts as the high-voltage generator. At the maximum output voltage, the total power consumption of the driver circuit is only 2.337 mW.
Keywords
Electrical and Electronic Engineering, Materials Chemistry, Electronic, Optical and Magnetic Materials, Condensed Matter Physics, MEMS driver circuit, High-voltage generator, Dickson charge pump, Charge recycling

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Citation

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MLA
Peng, Hui, et al. “A Monolithic Low-Power-Consumption Driver Circuit Based on a Dickson Charge Pump for MEMS Actuator Applications.” SOLID-STATE ELECTRONICS, vol. 164, 2020.
APA
Peng, H., De Pauw, H., Bauwens, P., & Doutreloigne, J. (2020). A monolithic low-power-consumption driver circuit based on a Dickson charge pump for MEMS actuator applications. SOLID-STATE ELECTRONICS, 164.
Chicago author-date
Peng, Hui, Herbert De Pauw, Pieter Bauwens, and Jan Doutreloigne. 2020. “A Monolithic Low-Power-Consumption Driver Circuit Based on a Dickson Charge Pump for MEMS Actuator Applications.” SOLID-STATE ELECTRONICS 164.
Chicago author-date (all authors)
Peng, Hui, Herbert De Pauw, Pieter Bauwens, and Jan Doutreloigne. 2020. “A Monolithic Low-Power-Consumption Driver Circuit Based on a Dickson Charge Pump for MEMS Actuator Applications.” SOLID-STATE ELECTRONICS 164.
Vancouver
1.
Peng H, De Pauw H, Bauwens P, Doutreloigne J. A monolithic low-power-consumption driver circuit based on a Dickson charge pump for MEMS actuator applications. SOLID-STATE ELECTRONICS. 2020;164.
IEEE
[1]
H. Peng, H. De Pauw, P. Bauwens, and J. Doutreloigne, “A monolithic low-power-consumption driver circuit based on a Dickson charge pump for MEMS actuator applications,” SOLID-STATE ELECTRONICS, vol. 164, 2020.
@article{8634720,
  abstract     = {This paper introduces a monolithic high-voltage driver circuit for use in MEMS applications. The proposed design offers an output voltage which can linearly sweep from 0 V to 72.8 V under zero-load conditions. To minimize the power consumption of the driver circuit, an advanced charge recycling strategy and finger capacitor structure are implemented in the Dickson charge pump which acts as the high-voltage generator. At the maximum output voltage, the total power consumption of the driver circuit is only 2.337 mW.},
  articleno    = {107683},
  author       = {Peng, Hui and De Pauw, Herbert and Bauwens, Pieter and Doutreloigne, Jan},
  issn         = {0038-1101},
  journal      = {SOLID-STATE ELECTRONICS},
  keywords     = {Electrical and Electronic Engineering,Materials Chemistry,Electronic,Optical and Magnetic Materials,Condensed Matter Physics,MEMS driver circuit,High-voltage generator,Dickson charge pump,Charge recycling},
  language     = {eng},
  title        = {A monolithic low-power-consumption driver circuit based on a Dickson charge pump for MEMS actuator applications},
  url          = {http://dx.doi.org/10.1016/j.sse.2019.107683},
  volume       = {164},
  year         = {2020},
}

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