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Atomic layer deposition of localised boron- and hydrogen-doped aluminium oxide using trimethyl borate as a dopant precursor

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MLA
Mattelaer, Felix, et al. “Atomic Layer Deposition of Localised Boron- and Hydrogen-Doped Aluminium Oxide Using Trimethyl Borate as a Dopant Precursor.” EuroCVD 22 - Baltic ALD 16, Conference Abstracts, 2019.
APA
Mattelaer, F., Van Daele, M., Minjauw, M., Sajavaara, T., Dendooven, J., & Detavernier, C. (2019). Atomic layer deposition of localised boron- and hydrogen-doped aluminium oxide using trimethyl borate as a dopant precursor. In EuroCVD 22 - Baltic ALD 16, Conference abstracts. Luxembourg, GD Luxembourg.
Chicago author-date
Mattelaer, Felix, Michiel Van Daele, Matthias Minjauw, Timo Sajavaara, Jolien Dendooven, and Christophe Detavernier. 2019. “Atomic Layer Deposition of Localised Boron- and Hydrogen-Doped Aluminium Oxide Using Trimethyl Borate as a Dopant Precursor.” In EuroCVD 22 - Baltic ALD 16, Conference Abstracts.
Chicago author-date (all authors)
Mattelaer, Felix, Michiel Van Daele, Matthias Minjauw, Timo Sajavaara, Jolien Dendooven, and Christophe Detavernier. 2019. “Atomic Layer Deposition of Localised Boron- and Hydrogen-Doped Aluminium Oxide Using Trimethyl Borate as a Dopant Precursor.” In EuroCVD 22 - Baltic ALD 16, Conference Abstracts.
Vancouver
1.
Mattelaer F, Van Daele M, Minjauw M, Sajavaara T, Dendooven J, Detavernier C. Atomic layer deposition of localised boron- and hydrogen-doped aluminium oxide using trimethyl borate as a dopant precursor. In: EuroCVD 22 - Baltic ALD 16, Conference abstracts. 2019.
IEEE
[1]
F. Mattelaer, M. Van Daele, M. Minjauw, T. Sajavaara, J. Dendooven, and C. Detavernier, “Atomic layer deposition of localised boron- and hydrogen-doped aluminium oxide using trimethyl borate as a dopant precursor,” in EuroCVD 22 - Baltic ALD 16, Conference abstracts, Luxembourg, GD Luxembourg, 2019.
@inproceedings{8625845,
  author       = {Mattelaer, Felix and Van Daele, Michiel and Minjauw, Matthias and Sajavaara, Timo and Dendooven, Jolien and Detavernier, Christophe},
  booktitle    = {EuroCVD 22 - Baltic ALD 16, Conference abstracts},
  language     = {eng},
  location     = {Luxembourg, GD Luxembourg},
  title        = {Atomic layer deposition of localised boron- and hydrogen-doped aluminium oxide using trimethyl borate as a dopant precursor},
  year         = {2019},
}