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Surface reactions during thermal and plasma-enhanced atomic layer deposition of titanium dioxide films using tetrakis(dimethylamino)titanium

Sofie Vandenbroucke (UGent) , Elisabeth Levrau, Matthias Minjauw (UGent) , Kevin Van de Kerckhove, Kilian Devloo-Casier (UGent) , Sreeprasanth Pulinthanathu Sree, Johan A Martens, Rita Vos, Karolien Jans, Jolien Dendooven (UGent) , et al.
(2019) EuroCVD 22 - Baltic ALD 16, Conference abstracts.
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MLA
Vandenbroucke, Sofie, et al. “Surface Reactions during Thermal and Plasma-Enhanced Atomic Layer Deposition of Titanium Dioxide Films Using Tetrakis(Dimethylamino)Titanium.” EuroCVD 22 - Baltic ALD 16, Conference Abstracts, 2019.
APA
Vandenbroucke, S., Levrau, E., Minjauw, M., Van de Kerckhove, K., Devloo-Casier, K., Sree, S. P., … Detavernier, C. (2019). Surface reactions during thermal and plasma-enhanced atomic layer deposition of titanium dioxide films using tetrakis(dimethylamino)titanium. In EuroCVD 22 - Baltic ALD 16, Conference abstracts. Luxembourg, GD Luxembourg.
Chicago author-date
Vandenbroucke, Sofie, Elisabeth Levrau, Matthias Minjauw, Kevin Van de Kerckhove, Kilian Devloo-Casier, Sreeprasanth Pulinthanathu Sree, Johan A Martens, et al. 2019. “Surface Reactions during Thermal and Plasma-Enhanced Atomic Layer Deposition of Titanium Dioxide Films Using Tetrakis(Dimethylamino)Titanium.” In EuroCVD 22 - Baltic ALD 16, Conference Abstracts.
Chicago author-date (all authors)
Vandenbroucke, Sofie, Elisabeth Levrau, Matthias Minjauw, Kevin Van de Kerckhove, Kilian Devloo-Casier, Sreeprasanth Pulinthanathu Sree, Johan A Martens, Rita Vos, Karolien Jans, Jolien Dendooven, Philippe Vereecken, Tim Stakenborg, and Christophe Detavernier. 2019. “Surface Reactions during Thermal and Plasma-Enhanced Atomic Layer Deposition of Titanium Dioxide Films Using Tetrakis(Dimethylamino)Titanium.” In EuroCVD 22 - Baltic ALD 16, Conference Abstracts.
Vancouver
1.
Vandenbroucke S, Levrau E, Minjauw M, Van de Kerckhove K, Devloo-Casier K, Sree SP, et al. Surface reactions during thermal and plasma-enhanced atomic layer deposition of titanium dioxide films using tetrakis(dimethylamino)titanium. In: EuroCVD 22 - Baltic ALD 16, Conference abstracts. 2019.
IEEE
[1]
S. Vandenbroucke et al., “Surface reactions during thermal and plasma-enhanced atomic layer deposition of titanium dioxide films using tetrakis(dimethylamino)titanium,” in EuroCVD 22 - Baltic ALD 16, Conference abstracts, Luxembourg, GD Luxembourg, 2019.
@inproceedings{8625841,
  author       = {{Vandenbroucke, Sofie and Levrau, Elisabeth and Minjauw, Matthias and Van de Kerckhove, Kevin and Devloo-Casier, Kilian and Sree, Sreeprasanth Pulinthanathu and Martens, Johan A and Vos, Rita and Jans, Karolien and Dendooven, Jolien and Vereecken, Philippe and Stakenborg, Tim and Detavernier, Christophe}},
  booktitle    = {{EuroCVD 22 - Baltic ALD 16, Conference abstracts}},
  language     = {{eng}},
  location     = {{Luxembourg, GD Luxembourg}},
  title        = {{Surface reactions during thermal and plasma-enhanced atomic layer deposition of titanium dioxide films using tetrakis(dimethylamino)titanium}},
  year         = {{2019}},
}