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A monolithic high-voltage driver circuit based on a Dickson charge pump for MEMS actuator applications

Hui Peng (UGent) , Herbert De Pauw (UGent) , Pieter Bauwens (UGent) and Jan Doutreloigne
Author
Organization
Abstract
—A monolithic high-voltage driver circuit is proposed for use in MEMS applications. To improve the efficiency of the driver circuit, an advanced charge recycling strategy and finger capacitor structure are implemented in the Dickson charge pump which acts as the high-voltage generator and can boost the output voltage to 100.9 V from a 3 V power supply. The roposed driver circuit offers an output voltage which can linearly sweep from 0 V to 100.9 V under zero-load conditions. By means of the feedback circuit, the driver circuit also can self-adjust the clock frequency to minimize the voltage variation caused by changes in the load conditions.
Keywords
Charge recycling, Dickson charge pump, High-voltage generator, MEMS driver circuit.

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Citation

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Chicago
Peng, Hui, Herbert De Pauw, Pieter Bauwens, and Jan Doutreloigne. 2019. “A Monolithic High-voltage Driver Circuit Based on a Dickson Charge Pump for MEMS Actuator Applications .” International Journal of Circuits, Systems and Signal Processing 13: 516–519.
APA
Peng, H., De Pauw, H., Bauwens, P., & Doutreloigne, J. (2019). A monolithic high-voltage driver circuit based on a Dickson charge pump for MEMS actuator applications . INTERNATIONAL JOURNAL OF CIRCUITS, SYSTEMS AND SIGNAL PROCESSING , 13, 516–519.
Vancouver
1.
Peng H, De Pauw H, Bauwens P, Doutreloigne J. A monolithic high-voltage driver circuit based on a Dickson charge pump for MEMS actuator applications . INTERNATIONAL JOURNAL OF CIRCUITS, SYSTEMS AND SIGNAL PROCESSING . 2019;13:516–9.
MLA
Peng, Hui et al. “A Monolithic High-voltage Driver Circuit Based on a Dickson Charge Pump for MEMS Actuator Applications .” INTERNATIONAL JOURNAL OF CIRCUITS, SYSTEMS AND SIGNAL PROCESSING 13 (2019): 516–519. Print.
@article{8625005,
  abstract     = {—A monolithic high-voltage driver circuit is proposed for use in MEMS applications. To improve the efficiency of the driver circuit, an advanced charge recycling strategy and finger capacitor structure are implemented in the Dickson charge pump which acts as the high-voltage generator and can boost the output voltage to 100.9 V from a 3 V power supply. The roposed driver circuit offers an output voltage which can linearly sweep from 0 V to 100.9 V under zero-load conditions. By means of the feedback circuit, the driver circuit also can self-adjust the clock frequency to minimize the voltage variation caused by changes in the load conditions. },
  author       = {Peng, Hui and De Pauw, Herbert and Bauwens, Pieter and  Doutreloigne,  Jan},
  journal      = {INTERNATIONAL JOURNAL OF CIRCUITS, SYSTEMS AND SIGNAL PROCESSING },
  keywords     = {Charge recycling,Dickson charge pump,High-voltage generator,MEMS driver circuit.},
  pages        = {516--519},
  title        = {A monolithic high-voltage driver circuit based on a Dickson charge pump for MEMS actuator applications },
  volume       = {13},
  year         = {2019},
}