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Conformality in atomic layer deposition : current status overview of analysis and modelling

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Chicago
Cremers, Véronique, Riikka L Puurunen, and Jolien Dendooven. 2019. “Conformality in Atomic Layer Deposition : Current Status Overview of Analysis and Modelling.” Applied Physics Reviews 6 (2).
APA
Cremers, V., Puurunen, R. L., & Dendooven, J. (2019). Conformality in atomic layer deposition : current status overview of analysis and modelling. APPLIED PHYSICS REVIEWS, 6(2).
Vancouver
1.
Cremers V, Puurunen RL, Dendooven J. Conformality in atomic layer deposition : current status overview of analysis and modelling. APPLIED PHYSICS REVIEWS. 2019;6(2).
MLA
Cremers, Véronique, Riikka L Puurunen, and Jolien Dendooven. “Conformality in Atomic Layer Deposition : Current Status Overview of Analysis and Modelling.” APPLIED PHYSICS REVIEWS 6.2 (2019): n. pag. Print.
@article{8614054,
  articleno    = {021302},
  author       = {Cremers, V{\'e}ronique and Puurunen, Riikka L and Dendooven, Jolien},
  issn         = {1931-9401},
  journal      = {APPLIED PHYSICS REVIEWS},
  language     = {eng},
  number       = {2},
  pages        = {43},
  title        = {Conformality in atomic layer deposition : current status overview of analysis and modelling},
  url          = {http://dx.doi.org/10.1063/1.5060967},
  volume       = {6},
  year         = {2019},
}

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