
The (in)stability of process control mechanisms in reactive DC sputtering deposition
- Author
- Koen Strijckmans (UGent) , Roeland Schelfhout (UGent) and Diederik Depla (UGent)
- Organization
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Strijckmans Poster PSE2018 final.pdf
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Citation
Please use this url to cite or link to this publication: http://hdl.handle.net/1854/LU-8612298
- MLA
- Strijckmans, Koen, et al. “The (in)Stability of Process Control Mechanisms in Reactive DC Sputtering Deposition.” Plasma Surface Engineering, 16th International Conference, Abstracts, 2018, doi:10.13140/RG.2.2.28368.15364.
- APA
- Strijckmans, K., Schelfhout, R., & Depla, D. (2018). The (in)stability of process control mechanisms in reactive DC sputtering deposition. In Plasma Surface Engineering, 16th International conference, Abstracts. Garmisch-Partenkirchen, Germany. https://doi.org/10.13140/RG.2.2.28368.15364
- Chicago author-date
- Strijckmans, Koen, Roeland Schelfhout, and Diederik Depla. 2018. “The (in)Stability of Process Control Mechanisms in Reactive DC Sputtering Deposition.” In Plasma Surface Engineering, 16th International Conference, Abstracts. https://doi.org/10.13140/RG.2.2.28368.15364.
- Chicago author-date (all authors)
- Strijckmans, Koen, Roeland Schelfhout, and Diederik Depla. 2018. “The (in)Stability of Process Control Mechanisms in Reactive DC Sputtering Deposition.” In Plasma Surface Engineering, 16th International Conference, Abstracts. doi:10.13140/RG.2.2.28368.15364.
- Vancouver
- 1.Strijckmans K, Schelfhout R, Depla D. The (in)stability of process control mechanisms in reactive DC sputtering deposition. In: Plasma Surface Engineering, 16th International conference, Abstracts. 2018.
- IEEE
- [1]K. Strijckmans, R. Schelfhout, and D. Depla, “The (in)stability of process control mechanisms in reactive DC sputtering deposition,” in Plasma Surface Engineering, 16th International conference, Abstracts, Garmisch-Partenkirchen, Germany, 2018.
@inproceedings{8612298, author = {{Strijckmans, Koen and Schelfhout, Roeland and Depla, Diederik}}, booktitle = {{Plasma Surface Engineering, 16th International conference, Abstracts}}, language = {{eng}}, location = {{Garmisch-Partenkirchen, Germany}}, title = {{The (in)stability of process control mechanisms in reactive DC sputtering deposition}}, url = {{http://dx.doi.org/10.13140/RG.2.2.28368.15364}}, year = {{2018}}, }
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