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Accurate extraction of fabricated geometry using optical measurement

(2018) PHOTONICS RESEARCH. 6(11). p.1008-1020
Author
Organization
Project
Center for nano- and biophotonics (NB-Photonics)
Project
Scalable behavioral models for large-scale silicon photonics
Keywords
Atomic and Molecular Physics, and Optics, Electronic, Optical and Magnetic Materials

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Citation

Please use this url to cite or link to this publication:

Chicago
Xing, Yufei, Jiaxing Dong, Sarvagya Dwivedi, Umar Khan, and Wim Bogaerts. 2018. “Accurate Extraction of Fabricated Geometry Using Optical Measurement.” Photonics Research 6 (11): 1008–1020.
APA
Xing, Y., Dong, J., Dwivedi, S., Khan, U., & Bogaerts, W. (2018). Accurate extraction of fabricated geometry using optical measurement. PHOTONICS RESEARCH, 6(11), 1008–1020.
Vancouver
1.
Xing Y, Dong J, Dwivedi S, Khan U, Bogaerts W. Accurate extraction of fabricated geometry using optical measurement. PHOTONICS RESEARCH. The Optical Society; 2018;6(11):1008–20.
MLA
Xing, Yufei et al. “Accurate Extraction of Fabricated Geometry Using Optical Measurement.” PHOTONICS RESEARCH 6.11 (2018): 1008–1020. Print.
@article{8605852,
  articleno    = {1008},
  author       = {Xing, Yufei and Dong, Jiaxing and Dwivedi, Sarvagya and Khan, Umar and Bogaerts, Wim},
  issn         = {2327-9125},
  journal      = {PHOTONICS RESEARCH},
  language     = {eng},
  number       = {11},
  pages        = {1008:1008--1008:1020},
  publisher    = {The Optical Society},
  title        = {Accurate extraction of fabricated geometry using optical measurement},
  url          = {http://dx.doi.org/10.1364/prj.6.001008},
  volume       = {6},
  year         = {2018},
}

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