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Accurate extraction of fabricated geometry using optical measurement

(2018) PHOTONICS RESEARCH. 6(11). p.1008-1020
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Atomic and Molecular Physics, and Optics, Electronic, Optical and Magnetic Materials

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Citation

Please use this url to cite or link to this publication:

MLA
Xing, Yufei, et al. “Accurate Extraction of Fabricated Geometry Using Optical Measurement.” PHOTONICS RESEARCH, vol. 6, no. 11, The Optical Society, 2018, pp. 1008–20.
APA
Xing, Y., Dong, J., Dwivedi, S., Khan, U., & Bogaerts, W. (2018). Accurate extraction of fabricated geometry using optical measurement. PHOTONICS RESEARCH, 6(11), 1008–1020.
Chicago author-date
Xing, Yufei, Jiaxing Dong, Sarvagya Dwivedi, Umar Khan, and Wim Bogaerts. 2018. “Accurate Extraction of Fabricated Geometry Using Optical Measurement.” PHOTONICS RESEARCH 6 (11): 1008–20.
Chicago author-date (all authors)
Xing, Yufei, Jiaxing Dong, Sarvagya Dwivedi, Umar Khan, and Wim Bogaerts. 2018. “Accurate Extraction of Fabricated Geometry Using Optical Measurement.” PHOTONICS RESEARCH 6 (11): 1008–1020.
Vancouver
1.
Xing Y, Dong J, Dwivedi S, Khan U, Bogaerts W. Accurate extraction of fabricated geometry using optical measurement. PHOTONICS RESEARCH. 2018;6(11):1008–20.
IEEE
[1]
Y. Xing, J. Dong, S. Dwivedi, U. Khan, and W. Bogaerts, “Accurate extraction of fabricated geometry using optical measurement,” PHOTONICS RESEARCH, vol. 6, no. 11, pp. 1008–1020, 2018.
@article{8605852,
  articleno    = {1008},
  author       = {Xing, Yufei and Dong, Jiaxing and Dwivedi, Sarvagya and Khan, Umar and Bogaerts, Wim},
  issn         = {2327-9125},
  journal      = {PHOTONICS RESEARCH},
  keywords     = {Atomic and Molecular Physics,and Optics,Electronic,Optical and Magnetic Materials},
  language     = {eng},
  number       = {11},
  pages        = {1008:1008--1008:1020},
  publisher    = {The Optical Society},
  title        = {Accurate extraction of fabricated geometry using optical measurement},
  url          = {http://dx.doi.org/10.1364/prj.6.001008},
  volume       = {6},
  year         = {2018},
}

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