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Atomic layer deposition of ultra-thin oxide semiconductors : challenges and opportunities

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Keywords
Atoms, Deposition, Nanostructures, Oxide semiconductors, Architechture, Atomic levels, Enabling technologies, Hetero-nanostructures, Material features, Nanostructured semiconductor, Tungsten oxide, Two Dimensional (2 D), Atomic layer deposition

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Citation

Please use this url to cite or link to this publication:

Chicago
Zhuiykov, Serge, Zhenyin Hai, Eugene Kats, Mohammad Karbalaeiakbari, and Chenyang Xue. 2017. “Atomic Layer Deposition of Ultra-thin Oxide Semiconductors : Challenges and Opportunities.” In Advanced Materials Research VII, ed. Serge Zhuiykov, 735:215–218. Durnten-Zürich, Switzerland: Trans Tech Publications.
APA
Zhuiykov, Serge, Hai, Z., Kats, E., Karbalaeiakbari, M., & Xue, C. (2017). Atomic layer deposition of ultra-thin oxide semiconductors : challenges and opportunities. In Serge Zhuiykov (Ed.), Advanced materials research VII (Vol. 735, pp. 215–218). Presented at the 7th International conference on Advanced Materials Research (ICAMR 2017), Durnten-Zürich, Switzerland: Trans Tech Publications.
Vancouver
1.
Zhuiykov S, Hai Z, Kats E, Karbalaeiakbari M, Xue C. Atomic layer deposition of ultra-thin oxide semiconductors : challenges and opportunities. In: Zhuiykov S, editor. Advanced materials research VII. Durnten-Zürich, Switzerland: Trans Tech Publications; 2017. p. 215–8.
MLA
Zhuiykov, Serge et al. “Atomic Layer Deposition of Ultra-thin Oxide Semiconductors : Challenges and Opportunities.” Advanced Materials Research VII. Ed. Serge Zhuiykov. Vol. 735. Durnten-Zürich, Switzerland: Trans Tech Publications, 2017. 215–218. Print.
@inproceedings{8600400,
  author       = {Zhuiykov, Serge and Hai, Zhenyin and Kats, Eugene and Karbalaeiakbari, Mohammad and Xue, Chenyang},
  booktitle    = {Advanced materials research VII},
  editor       = {Zhuiykov, Serge},
  isbn         = {9783035710878},
  issn         = {1013-9826},
  language     = {eng},
  location     = {Hong Kong, PR China},
  pages        = {215--218},
  publisher    = {Trans Tech Publications},
  title        = {Atomic layer deposition of ultra-thin oxide semiconductors : challenges and opportunities},
  url          = {http://dx.doi.org/10.4028/www.scientific.net/KEM.735.215},
  volume       = {735},
  year         = {2017},
}

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