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Polymer wedge for perfectly vertical light coupling to silicon

Jonathan Schrauwen UGent, Stijn Scheerlinck UGent, Dries Van Thourhout UGent and Roel Baets UGent (2009) PROCEEDINGS OF SPIE - THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING. 7218.
abstract
We present the design and fabrication of a refractive polymer wedge that allows perfectly vertical coupling of light into a silicon waveguide, which is of interest for flip-chip bonding of vertical cavity emitting light sources on a silicon integrated circuit. The structure includes a conventional diffractive grating coupler that requires off-normal incidence to avoid second order Bragg reflections. The polymer wedge is thus used to refract vertically impinging light into an off-normal wave that couples into the underlying grating. The fabrication involves two steps: mold fabrication and imprint replication. Firstly negative wedge-shaped craters are etched into a quartz mold by Focused-ion-beam milling. Secondly the mold is used to imprint a UV-curable polymer onto a silicon chip containing waveguides and grating couplers, and so replicating the wedges. The characterization setup consisted of a fiber-to-fiber transmission measurement of a silicon waveguide equipped with a pair of grating couplers and polymer wedges. The obtained fiber coupling efficiency was equal to the efficiency of regular grating couplers and fiber positioned at an off-normal angle. The proposed fabrication method enables low cost integration of vertical cavity emitting light sources on silicon integrated photonic circuits.
Please use this url to cite or link to this publication:
author
organization
year
type
conference (proceedingsPaper)
publication status
published
subject
keyword
vertical cavity emitting light sources, diffractive grating coupler, flip-chip bonding, refractive polymer wedge, perfectly vertical light coupling, surface emitting lasers, integrated optics, focused ion beam technology, diffraction gratings, flip-chip devices, focused-ion-beam milling, fiber-to-fiber transmission measurement, UV-curable polymer
in
PROCEEDINGS OF SPIE - THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING
Proc. SPIE Int. Soc. Opt. Eng.
editor
Jean-Emmanuel Broquin and Christoph M Greiner
volume
7218
issue title
Integrated Optics : Devices, Materials, and Technologies XIII
pages
8 pages
publisher
SPIE, the International Society for Optical Engineering
place of publication
Bellingham, WA, USA
conference name
Integrated Optics : Devices, Materials, and Technologies XIII
conference location
San José, CA, USA
conference start
2009-01-24
conference end
2009-01-29
Web of Science type
Proceedings Paper
Web of Science id
000285748100010
ISSN
0277-786X
DOI
10.1117/12.807558
language
English
UGent publication?
yes
classification
P1
additional info
article no. 72180B (8 pages)
copyright statement
I have transferred the copyright for this publication to the publisher
id
859539
handle
http://hdl.handle.net/1854/LU-859539
date created
2010-02-12 11:06:08
date last changed
2017-01-02 09:52:45
@inproceedings{859539,
  abstract     = {We present the design and fabrication of a refractive polymer wedge that allows perfectly vertical coupling of light into a silicon waveguide, which is of interest for flip-chip bonding of vertical cavity emitting light sources on a silicon integrated circuit. The structure includes a conventional diffractive grating coupler that requires off-normal incidence to avoid second order Bragg reflections. The polymer wedge is thus used to refract vertically impinging light into an off-normal wave that couples into the underlying grating. The fabrication involves two steps: mold fabrication and imprint replication. Firstly negative wedge-shaped craters are etched into a quartz mold by Focused-ion-beam milling. Secondly the mold is used to imprint a UV-curable polymer onto a silicon chip containing waveguides and grating couplers, and so replicating the wedges. The characterization setup consisted of a fiber-to-fiber transmission measurement of a silicon waveguide equipped with a pair of grating couplers and polymer wedges. The obtained fiber coupling efficiency was equal to the efficiency of regular grating couplers and fiber positioned at an off-normal angle. The proposed fabrication method enables low cost integration of vertical cavity emitting light sources on silicon integrated photonic circuits.},
  author       = {Schrauwen, Jonathan and Scheerlinck, Stijn and Van Thourhout, Dries and Baets, Roel},
  booktitle    = {PROCEEDINGS OF SPIE - THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING},
  editor       = {Broquin, Jean-Emmanuel and Greiner, Christoph M},
  issn         = {0277-786X},
  keyword      = {vertical cavity emitting light sources,diffractive grating coupler,flip-chip bonding,refractive polymer wedge,perfectly vertical light coupling,surface emitting lasers,integrated optics,focused ion beam technology,diffraction gratings,flip-chip devices,focused-ion-beam milling,fiber-to-fiber transmission measurement,UV-curable polymer},
  language     = {eng},
  location     = {San Jos{\'e}, CA, USA},
  pages        = {8},
  publisher    = {SPIE, the International Society for Optical Engineering},
  title        = {Polymer wedge for perfectly vertical light coupling to silicon},
  url          = {http://dx.doi.org/10.1117/12.807558},
  volume       = {7218},
  year         = {2009},
}

Chicago
Schrauwen, Jonathan, Stijn Scheerlinck, Dries Van Thourhout, and Roel Baets. 2009. “Polymer Wedge for Perfectly Vertical Light Coupling to Silicon.” In Proceedings of Spie - the International Society for Optical Engineering, ed. Jean-Emmanuel Broquin and Christoph M Greiner. Vol. 7218. Bellingham, WA, USA: SPIE, the International Society for Optical Engineering.
APA
Schrauwen, J., Scheerlinck, S., Van Thourhout, D., & Baets, R. (2009). Polymer wedge for perfectly vertical light coupling to silicon. In J.-E. Broquin & C. M. Greiner (Eds.), PROCEEDINGS OF SPIE - THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING (Vol. 7218). Presented at the Integrated Optics : Devices, Materials, and Technologies XIII, Bellingham, WA, USA: SPIE, the International Society for Optical Engineering.
Vancouver
1.
Schrauwen J, Scheerlinck S, Van Thourhout D, Baets R. Polymer wedge for perfectly vertical light coupling to silicon. In: Broquin J-E, Greiner CM, editors. PROCEEDINGS OF SPIE - THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING. Bellingham, WA, USA: SPIE, the International Society for Optical Engineering; 2009.
MLA
Schrauwen, Jonathan, Stijn Scheerlinck, Dries Van Thourhout, et al. “Polymer Wedge for Perfectly Vertical Light Coupling to Silicon.” Proceedings of Spie - the International Society for Optical Engineering. Ed. Jean-Emmanuel Broquin & Christoph M Greiner. Vol. 7218. Bellingham, WA, USA: SPIE, the International Society for Optical Engineering, 2009. Print.