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Layout-aware yield prediction of photonic circuits

Wim Bogaerts (UGent) , Umar Khan (UGent) and Yufei Xing (UGent)
Author
Organization
Project
Scalable behavioral models for large-scale silicon photonics
Project
Center for nano- and biophotonics (NB-Photonics)
Abstract
We demonstrate yield prediction of silicon wavelength filters using layout-aware Monte-Carlo circuit simulations. Maps of wafer and die-level variability of width and thickness are projected onto circuit layout and translated into circuit model parameters. We apply this onto Mach-Zehnder lattice filters with different filter orders.

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Citation

Please use this url to cite or link to this publication:

Chicago
Bogaerts, Wim, Umar Khan, and Yufei Xing. 2018. “Layout-aware Yield Prediction of Photonic Circuits.” In 2018 IEEE 15TH INTERNATIONAL CONFERENCE ON GROUP IV PHOTONICS (GFP), 93–94. New york: Ieee.
APA
Bogaerts, Wim, Khan, U., & Xing, Y. (2018). Layout-aware yield prediction of photonic circuits. 2018 IEEE 15TH INTERNATIONAL CONFERENCE ON GROUP IV PHOTONICS (GFP) (pp. 93–94). Presented at the 15th IEEE International Conference on Group IV Photonics (GFP), New york: Ieee.
Vancouver
1.
Bogaerts W, Khan U, Xing Y. Layout-aware yield prediction of photonic circuits. 2018 IEEE 15TH INTERNATIONAL CONFERENCE ON GROUP IV PHOTONICS (GFP). New york: Ieee; 2018. p. 93–4.
MLA
Bogaerts, Wim, Umar Khan, and Yufei Xing. “Layout-aware Yield Prediction of Photonic Circuits.” 2018 IEEE 15TH INTERNATIONAL CONFERENCE ON GROUP IV PHOTONICS (GFP). New york: Ieee, 2018. 93–94. Print.
@inproceedings{8580366,
  abstract     = {We demonstrate yield prediction of silicon wavelength filters using layout-aware Monte-Carlo circuit simulations. Maps of wafer and die-level variability of width and thickness are projected onto circuit layout and translated into circuit model parameters. We apply this onto Mach-Zehnder lattice filters with different filter orders.},
  author       = {Bogaerts, Wim and Khan, Umar and Xing, Yufei},
  booktitle    = {2018 IEEE 15TH INTERNATIONAL CONFERENCE ON GROUP IV PHOTONICS (GFP)},
  isbn         = {978-1-5386-5361-6},
  issn         = {1949-2081},
  language     = {eng},
  location     = {CANCUN, MEXICO},
  pages        = {93--94},
  publisher    = {Ieee},
  title        = {Layout-aware yield prediction of photonic circuits},
  year         = {2018},
}

Web of Science
Times cited: