Advanced search

Inherent area-selective growth and nucleation enhancement during Ru ALD using the RuO4-precursor and H2-gas

Author
Organization

Citation

Please use this url to cite or link to this publication:

Chicago
Minjauw, Matthias, Hannes Rijckaert, Isabel Vandriessche, Christophe Detavernier, and Jolien Dendooven. 2018. “Inherent Area-selective Growth and Nucleation Enhancement During Ru ALD Using the RuO4-precursor and H2-gas .” In ECS Meeting Abstracts. Pennington, NJ, USA: The Electrochemical Society (ECS).
APA
Minjauw, M., Rijckaert, H., Vandriessche, I., Detavernier, C., & Dendooven, J. (2018). Inherent area-selective growth and nucleation enhancement during Ru ALD using the RuO4-precursor and H2-gas . ECS Meeting Abstracts. Presented at the AiMES 2018 meeting: ECS and SMEQ joint international meeting, Pennington, NJ, USA: The Electrochemical Society (ECS).
Vancouver
1.
Minjauw M, Rijckaert H, Vandriessche I, Detavernier C, Dendooven J. Inherent area-selective growth and nucleation enhancement during Ru ALD using the RuO4-precursor and H2-gas . ECS Meeting Abstracts. Pennington, NJ, USA: The Electrochemical Society (ECS); 2018.
MLA
Minjauw, Matthias et al. “Inherent Area-selective Growth and Nucleation Enhancement During Ru ALD Using the RuO4-precursor and H2-gas .” ECS Meeting Abstracts. Pennington, NJ, USA: The Electrochemical Society (ECS), 2018. Print.
@inproceedings{8577871,
  articleno    = {abstract  MA2018-02  984},
  author       = {Minjauw, Matthias and Rijckaert, Hannes and Vandriessche, Isabel and Detavernier, Christophe and Dendooven, Jolien},
  booktitle    = {ECS Meeting Abstracts},
  issn         = {2151-2041},
  language     = {eng},
  location     = {Canc{\'u}n, Mexico},
  number       = {MA2018-02},
  publisher    = {The Electrochemical Society (ECS)},
  title        = {Inherent area-selective growth and nucleation enhancement during Ru ALD using the RuO4-precursor and H2-gas },
  url          = {http://ma.ecsdl.org/content/MA2018-02/30/984.abstract},
  year         = {2018},
}