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Inherent area-selective growth and nucleation enhancement during Ru ALD using the RuO4-precursor and H2-gas

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MLA
Minjauw, Matthias, et al. “Inherent Area-Selective Growth and Nucleation Enhancement during Ru ALD Using the RuO4-Precursor and H2-Gas.” ECS Meeting Abstracts, no. MA2018-02, The Electrochemical Society (ECS), 2018.
APA
Minjauw, M., Rijckaert, H., Van Driessche, I., Detavernier, C., & Dendooven, J. (2018). Inherent area-selective growth and nucleation enhancement during Ru ALD using the RuO4-precursor and H2-gas. In ECS Meeting Abstracts. Pennington, NJ, USA: The Electrochemical Society (ECS).
Chicago author-date
Minjauw, Matthias, Hannes Rijckaert, Isabel Van Driessche, Christophe Detavernier, and Jolien Dendooven. 2018. “Inherent Area-Selective Growth and Nucleation Enhancement during Ru ALD Using the RuO4-Precursor and H2-Gas.” In ECS Meeting Abstracts. Pennington, NJ, USA: The Electrochemical Society (ECS).
Chicago author-date (all authors)
Minjauw, Matthias, Hannes Rijckaert, Isabel Van Driessche, Christophe Detavernier, and Jolien Dendooven. 2018. “Inherent Area-Selective Growth and Nucleation Enhancement during Ru ALD Using the RuO4-Precursor and H2-Gas.” In ECS Meeting Abstracts. Pennington, NJ, USA: The Electrochemical Society (ECS).
Vancouver
1.
Minjauw M, Rijckaert H, Van Driessche I, Detavernier C, Dendooven J. Inherent area-selective growth and nucleation enhancement during Ru ALD using the RuO4-precursor and H2-gas. In: ECS Meeting Abstracts. Pennington, NJ, USA: The Electrochemical Society (ECS); 2018.
IEEE
[1]
M. Minjauw, H. Rijckaert, I. Van Driessche, C. Detavernier, and J. Dendooven, “Inherent area-selective growth and nucleation enhancement during Ru ALD using the RuO4-precursor and H2-gas,” in ECS Meeting Abstracts, Cancún, Mexico, 2018, no. MA2018-02.
@inproceedings{8577871,
  articleno    = {abstract  MA2018-02  984},
  author       = {Minjauw, Matthias and Rijckaert, Hannes and Van Driessche, Isabel and Detavernier, Christophe and Dendooven, Jolien},
  booktitle    = {ECS Meeting Abstracts},
  issn         = {2151-2041},
  language     = {eng},
  location     = {Cancún, Mexico},
  number       = {MA2018-02},
  publisher    = {The Electrochemical Society (ECS)},
  title        = {Inherent area-selective growth and nucleation enhancement during Ru ALD using the RuO4-precursor and H2-gas},
  url          = {http://ma.ecsdl.org/content/MA2018-02/30/984.abstract},
  year         = {2018},
}