Advanced search
1 file | 728.81 KB Add to list

Compositional effects on the growth of Mg(M)O films

Author
Organization
Abstract
The influence of the composition on the crystallographic properties of deposited Mg(M)O (with M=Al, Cr, Ti, Y, and Zr) films is studied. For a flexible control of the composition, dual reactive magnetron sputtering was used as deposition technique. Two different approaches to predict the composition are discussed. The first is an experimental way based on the simple relationship between the deposition rate and the target-substrate distance. The second is a route using a Monte Carlo based particle trajectory code. Both methods require a minimal experimental input and enable the user to quickly predict the composition of complex thin films. Good control and flexibility allow us to study the compositional effects on the growth of Mg(M)O films. Pure MgO thin films were grown with a (111) preferential out-of-plane orientation. When adding M to MgO, two trends were noticed. The first trend is a change in the MgO lattice parameters compared to pure MgO. The second tendency is a decrease in the crystallinity of the MgO phase. The experimentally determined crystallographic properties are shown to be in correspondence with the predicted properties from molecular dynamics simulations.
Keywords
THERMAL-STABILITY, BAND-GAP, DIELECTRIC-PROPERTIES, ELECTRICAL-PROPERTIES, molecular dynamics method, Monte Carlo methods, thin films, magnesium compounds, lattice constants, sputter deposition, PULSED-LASER DEPOSITION, MONTE-CARLO-SIMULATION, OXIDE THIN-FILMS, BIAXIAL ALIGNMENT, SOLID-SOLUTIONS, MAGNETRON

Downloads

  • (...).pdf
    • full text
    • |
    • UGent only
    • |
    • PDF
    • |
    • 728.81 KB

Citation

Please use this url to cite or link to this publication:

MLA
Martins Saraiva, Marta, Violeta Georgieva, Stijn Mahieu, et al. “Compositional Effects on the Growth of Mg(M)O Films.” JOURNAL OF APPLIED PHYSICS 107.3 (2010): n. pag. Print.
APA
Martins Saraiva, M., Georgieva, V., Mahieu, S., Van Aeken, K., Bogaerts, A., & Depla, D. (2010). Compositional effects on the growth of Mg(M)O films. JOURNAL OF APPLIED PHYSICS, 107(3).
Chicago author-date
Martins Saraiva, Marta, Violeta Georgieva, Stijn Mahieu, Koen Van Aeken, Annemie Bogaerts, and Diederik Depla. 2010. “Compositional Effects on the Growth of Mg(M)O Films.” Journal of Applied Physics 107 (3).
Chicago author-date (all authors)
Martins Saraiva, Marta, Violeta Georgieva, Stijn Mahieu, Koen Van Aeken, Annemie Bogaerts, and Diederik Depla. 2010. “Compositional Effects on the Growth of Mg(M)O Films.” Journal of Applied Physics 107 (3).
Vancouver
1.
Martins Saraiva M, Georgieva V, Mahieu S, Van Aeken K, Bogaerts A, Depla D. Compositional effects on the growth of Mg(M)O films. JOURNAL OF APPLIED PHYSICS. 2010;107(3).
IEEE
[1]
M. Martins Saraiva, V. Georgieva, S. Mahieu, K. Van Aeken, A. Bogaerts, and D. Depla, “Compositional effects on the growth of Mg(M)O films,” JOURNAL OF APPLIED PHYSICS, vol. 107, no. 3, 2010.
@article{857312,
  abstract     = {The influence of the composition on the crystallographic properties of deposited Mg(M)O (with M=Al, Cr, Ti, Y, and Zr) films is studied. For a flexible control of the composition, dual reactive magnetron sputtering was used as deposition technique. Two different approaches to predict the composition are discussed. The first is an experimental way based on the simple relationship between the deposition rate and the target-substrate distance. The second is a route using a Monte Carlo based particle trajectory code. Both methods require a minimal experimental input and enable the user to quickly predict the composition of complex thin films. Good control and flexibility allow us to study the compositional effects on the growth of Mg(M)O films. Pure MgO thin films were grown with a (111) preferential out-of-plane orientation. When adding M to MgO, two trends were noticed. The first trend is a change in the MgO lattice parameters compared to pure MgO. The second tendency is a decrease in the crystallinity of the MgO phase. The experimentally determined crystallographic properties are shown to be in correspondence with the predicted properties from molecular dynamics simulations.},
  articleno    = {034902},
  author       = {Martins Saraiva, Marta and Georgieva, Violeta and Mahieu, Stijn and Van Aeken, Koen and Bogaerts, Annemie and Depla, Diederik},
  issn         = {0021-8979},
  journal      = {JOURNAL OF APPLIED PHYSICS},
  keywords     = {THERMAL-STABILITY,BAND-GAP,DIELECTRIC-PROPERTIES,ELECTRICAL-PROPERTIES,molecular dynamics method,Monte Carlo methods,thin films,magnesium compounds,lattice constants,sputter deposition,PULSED-LASER DEPOSITION,MONTE-CARLO-SIMULATION,OXIDE THIN-FILMS,BIAXIAL ALIGNMENT,SOLID-SOLUTIONS,MAGNETRON},
  language     = {eng},
  number       = {3},
  pages        = {10},
  title        = {Compositional effects on the growth of Mg(M)O films},
  url          = {http://dx.doi.org/10.1063/1.3284949},
  volume       = {107},
  year         = {2010},
}

Altmetric
View in Altmetric
Web of Science
Times cited: