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CMOS-compatible ALD zinc oxide coating for on-chip second-order nonlinear optical functionalities

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Center for nano- and biophotonics (NB-Photonics)

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Citation

Please use this url to cite or link to this publication:

Chicago
Hermans, Artur, Michiel Van Daele, C. Kieninger, Jolien Dendooven, Stéphane Clemmen, Christophe Detavernier, and Roel Baets. 2017. “CMOS-compatible ALD Zinc Oxide Coating for On-chip Second-order Nonlinear Optical Functionalities.” In 2017 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO), 1–2.
APA
Hermans, A., Van Daele, M., Kieninger, C., Dendooven, J., Clemmen, S., Detavernier, C., & Baets, R. (2017). CMOS-compatible ALD zinc oxide coating for on-chip second-order nonlinear optical functionalities. 2017 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO) (pp. 1–2). Presented at the Conference on Lasers and Electro-Optics (CLEO).
Vancouver
1.
Hermans A, Van Daele M, Kieninger C, Dendooven J, Clemmen S, Detavernier C, et al. CMOS-compatible ALD zinc oxide coating for on-chip second-order nonlinear optical functionalities. 2017 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO). 2017. p. 1–2.
MLA
Hermans, Artur, Michiel Van Daele, C. Kieninger, et al. “CMOS-compatible ALD Zinc Oxide Coating for On-chip Second-order Nonlinear Optical Functionalities.” 2017 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO). 2017. 1–2. Print.
@inproceedings{8547796,
  articleno    = {paper SM3K.3},
  author       = {Hermans, Artur and Van Daele, Michiel and Kieninger, C. and Dendooven, Jolien and Clemmen, St{\'e}phane and Detavernier, Christophe and Baets, Roel},
  booktitle    = {2017 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO)},
  isbn         = { 978-1-943580-27-9},
  issn         = {2160-9020 },
  language     = {eng},
  location     = {San Jose, USA},
  pages        = {paper SM3K.3:1--paper SM3K.3:2},
  title        = {CMOS-compatible ALD zinc oxide coating for on-chip second-order nonlinear optical functionalities},
  year         = {2017},
}

Web of Science
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