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Ultra-compact silicon nitride grating coupler for microscopy systems

Yunpeng Zhu (UGent) , Jie Wang, Weiqiang Xie (UGent) , Bin Tian (UGent) , Yanlu Li (UGent) , Edouard Brainis (UGent) , Yuqing Jiao and Dries Van Thourhout (UGent)
(2017) OPTICS EXPRESS. 25(26). p.33297-33304
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Center for nano- and biophotonics (NB-Photonics)
Abstract
Grating couplers have been widely used for coupling light between photonic chips and optical fibers. For various quantum-optics and bio-optics experiments, on the other hand, there is a need to achieve good light coupling between photonic chips and microscopy systems. Here, we propose an ultra-compact silicon nitride (SiN) grating coupler optimized for coupling light from a waveguide to a microscopy system. The grating coupler is about 4 by 2 mu m(2) in size and a 116 nm 1 dB bandwidth can be achieved theoretically. An optimized fabrication process was developed to realize suspended SiN waveguides integrated with these couplers on top of a highly reflective bottom mirror. Experimental results show that up to 53% (2.76 dB loss) of the power of the TE mode can be coupled from a suspended SiN waveguide to a microscopy system with a numerical aperture (NA) = 0.65. Simulations show this efficiency can increase up to 75% (1.25 dB loss) for NA = 0.95.
Keywords
PHOTONIC INTEGRATED-CIRCUITS, COLLOIDAL QUANTUM DOTS, WAVE-GUIDES

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Chicago
Zhu, Yunpeng, Jie Wang, Weiqiang Xie, Bin Tian, Yanlu Li, Edouard Brainis, Yuqing Jiao, and Dries Van Thourhout. 2017. “Ultra-compact Silicon Nitride Grating Coupler for Microscopy Systems.” Optics Express 25 (26): 33297–33304.
APA
Zhu, Y., Wang, J., Xie, W., Tian, B., Li, Y., Brainis, E., Jiao, Y., et al. (2017). Ultra-compact silicon nitride grating coupler for microscopy systems. OPTICS EXPRESS, 25(26), 33297–33304.
Vancouver
1.
Zhu Y, Wang J, Xie W, Tian B, Li Y, Brainis E, et al. Ultra-compact silicon nitride grating coupler for microscopy systems. OPTICS EXPRESS. 2017;25(26):33297–304.
MLA
Zhu, Yunpeng et al. “Ultra-compact Silicon Nitride Grating Coupler for Microscopy Systems.” OPTICS EXPRESS 25.26 (2017): 33297–33304. Print.
@article{8547008,
  abstract     = {Grating couplers have been widely used for coupling light between photonic chips and optical fibers. For various quantum-optics and bio-optics experiments, on the other hand, there is a need to achieve good light coupling between photonic chips and microscopy systems. Here, we propose an ultra-compact silicon nitride (SiN) grating coupler optimized for coupling light from a waveguide to a microscopy system. The grating coupler is about 4 by 2 mu m(2) in size and a 116 nm 1 dB bandwidth can be achieved theoretically. An optimized fabrication process was developed to realize suspended SiN waveguides integrated with these couplers on top of a highly reflective bottom mirror. Experimental results show that up to 53\% (2.76 dB loss) of the power of the TE mode can be coupled from a suspended SiN waveguide to a microscopy system with a numerical aperture (NA) = 0.65. Simulations show this efficiency can increase up to 75\% (1.25 dB loss) for NA = 0.95.},
  author       = {Zhu, Yunpeng and Wang, Jie and Xie, Weiqiang and Tian, Bin and Li, Yanlu and Brainis, Edouard and Jiao, Yuqing and Van Thourhout, Dries},
  issn         = {1094-4087},
  journal      = {OPTICS EXPRESS},
  language     = {eng},
  number       = {26},
  pages        = {33297--33304},
  title        = {Ultra-compact silicon nitride grating coupler for microscopy systems},
  url          = {http://dx.doi.org/10.1364/oe.25.033297},
  volume       = {25},
  year         = {2017},
}

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