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The effect of energy and momentum transfer during magnetron sputter deposition of yttrium oxide thin films

(2018) APPLIED SURFACE SCIENCE. 439. p.545-551
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Keywords
Magnetron sputtering, Y2O3, Energy per arriving atom, Intrinsic stress, X-RAY-DIFFRACTION, PHASE-TRANSFORMATION, INTRINSIC STRESS, INTERNAL-STRESS, Y2O3 FILMS, COATINGS, MICROSTRUCTURE, RESISTANCE, ALLOY, PACK

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Citation

Please use this url to cite or link to this publication:

MLA
Xia, Jinjiao, Wenping Liang, Qiang Miao, et al. “The Effect of Energy and Momentum Transfer During Magnetron Sputter Deposition of Yttrium Oxide Thin Films.” APPLIED SURFACE SCIENCE 439 (2018): 545–551. Print.
APA
Xia, Jinjiao, Liang, W., Miao, Q., & Depla, D. (2018). The effect of energy and momentum transfer during magnetron sputter deposition of yttrium oxide thin films. APPLIED SURFACE SCIENCE, 439, 545–551.
Chicago author-date
Xia, Jinjiao, Wenping Liang, Qiang Miao, and Diederik Depla. 2018. “The Effect of Energy and Momentum Transfer During Magnetron Sputter Deposition of Yttrium Oxide Thin Films.” Applied Surface Science 439: 545–551.
Chicago author-date (all authors)
Xia, Jinjiao, Wenping Liang, Qiang Miao, and Diederik Depla. 2018. “The Effect of Energy and Momentum Transfer During Magnetron Sputter Deposition of Yttrium Oxide Thin Films.” Applied Surface Science 439: 545–551.
Vancouver
1.
Xia J, Liang W, Miao Q, Depla D. The effect of energy and momentum transfer during magnetron sputter deposition of yttrium oxide thin films. APPLIED SURFACE SCIENCE. 2018;439:545–51.
IEEE
[1]
J. Xia, W. Liang, Q. Miao, and D. Depla, “The effect of energy and momentum transfer during magnetron sputter deposition of yttrium oxide thin films,” APPLIED SURFACE SCIENCE, vol. 439, pp. 545–551, 2018.
@article{8544865,
  author       = {Xia, Jinjiao and Liang, Wenping and Miao, Qiang and Depla, Diederik},
  issn         = {0169-4332},
  journal      = {APPLIED SURFACE SCIENCE},
  keywords     = {Magnetron sputtering,Y2O3,Energy per arriving atom,Intrinsic stress,X-RAY-DIFFRACTION,PHASE-TRANSFORMATION,INTRINSIC STRESS,INTERNAL-STRESS,Y2O3 FILMS,COATINGS,MICROSTRUCTURE,RESISTANCE,ALLOY,PACK},
  language     = {eng},
  pages        = {545--551},
  title        = {The effect of energy and momentum transfer during magnetron sputter deposition of yttrium oxide thin films},
  url          = {http://dx.doi.org/10.1016/j.apsusc.2017.12.205},
  volume       = {439},
  year         = {2018},
}

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