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Plasma enhanced atomic layer deposition of silver using the Ag(fod)(PEt₃)-precursor and NH₃-plasma

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Chicago
Minjauw, Matthias, Eduardo Solano Minuesa, Sree Pulinthanathu Sree, Ramesh Asapu, Michiel Van Daele, Ranjith Karuparambil Ramachandran, Sammy Verbruggen, et al. 2017. “Plasma Enhanced Atomic Layer Deposition of Silver Using the Ag(fod)(PEt₃)-precursor and NH₃-plasma.” In Atomic Layer Deposition, 17th International Conference, Abstracts.
APA
Minjauw, M., Solano Minuesa, E., Pulinthanathu Sree, S., Asapu, R., Van Daele, M., Karuparambil Ramachandran, R., Verbruggen, S., et al. (2017). Plasma enhanced atomic layer deposition of silver using the Ag(fod)(PEt₃)-precursor and NH₃-plasma. Atomic Layer Deposition, 17th International conference, Abstracts. Presented at the 17th International conference on Atomic Layer Deposition (ALD 2017).
Vancouver
1.
Minjauw M, Solano Minuesa E, Pulinthanathu Sree S, Asapu R, Van Daele M, Karuparambil Ramachandran R, et al. Plasma enhanced atomic layer deposition of silver using the Ag(fod)(PEt₃)-precursor and NH₃-plasma. Atomic Layer Deposition, 17th International conference, Abstracts. 2017.
MLA
Minjauw, Matthias, Eduardo Solano Minuesa, Sree Pulinthanathu Sree, et al. “Plasma Enhanced Atomic Layer Deposition of Silver Using the Ag(fod)(PEt₃)-precursor and NH₃-plasma.” Atomic Layer Deposition, 17th International Conference, Abstracts. 2017. Print.
@inproceedings{8543391,
  author       = {Minjauw, Matthias and Solano Minuesa, Eduardo and Pulinthanathu Sree, Sree and Asapu, Ramesh and Van Daele, Michiel and Karuparambil Ramachandran, Ranjith and Verbruggen, Sammy and Lenaerts, Silvia and Martens, Johan and Detavernier, Christophe and Dendooven, Jolien},
  booktitle    = {Atomic Layer Deposition, 17th International conference, Abstracts},
  language     = {eng},
  location     = {Denver, CO, USA},
  title        = {Plasma enhanced atomic layer deposition of silver using the Ag(fod)(PEt\unmatched{2083})-precursor and NH\unmatched{2083}-plasma},
  year         = {2017},
}