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Plasma enhanced atomic layer deposition of silver using the Ag(fod)(PEt₃)-precursor and NH₃-plasma

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Chicago
Minjauw, Matthias, Eduardo Solano Minuesa, Sree Pulinthanathu Sree, Ramesh Asapu, Michiel Van Daele, Ranjith Karuparambil Ramachandran, Sammy Verbruggen, et al. 2017. “Plasma Enhanced Atomic Layer Deposition of Silver Using the Ag(fod)(PEt₃)-precursor and NH₃-plasma.” In EuroCVD-21 - Baltic ALD-15, Joint Meeting, Abstracts.
APA
Minjauw, M., Solano Minuesa, E., Pulinthanathu Sree, S., Asapu, R., Van Daele, M., Karuparambil Ramachandran, R., Verbruggen, S., et al. (2017). Plasma enhanced atomic layer deposition of silver using the Ag(fod)(PEt₃)-precursor and NH₃-plasma. EuroCVD-21 - Baltic ALD-15, Joint meeting, Abstracts. Presented at the Joint  meeting EuroCVD-21 - Baltic ALD-15.
Vancouver
1.
Minjauw M, Solano Minuesa E, Pulinthanathu Sree S, Asapu R, Van Daele M, Karuparambil Ramachandran R, et al. Plasma enhanced atomic layer deposition of silver using the Ag(fod)(PEt₃)-precursor and NH₃-plasma. EuroCVD-21 - Baltic ALD-15, Joint meeting, Abstracts. 2017.
MLA
Minjauw, Matthias, Eduardo Solano Minuesa, Sree Pulinthanathu Sree, et al. “Plasma Enhanced Atomic Layer Deposition of Silver Using the Ag(fod)(PEt₃)-precursor and NH₃-plasma.” EuroCVD-21 - Baltic ALD-15, Joint Meeting, Abstracts. 2017. Print.
@inproceedings{8543390,
  author       = {Minjauw, Matthias and Solano Minuesa, Eduardo and Pulinthanathu Sree, Sree and Asapu, Ramesh and Van Daele, Michiel and Karuparambil Ramachandran, Ranjith and Verbruggen, Sammy and Lenaerts, Silvia and Martens, Johan and Detavernier, Christophe and Dendooven, Jolien},
  booktitle    = {EuroCVD-21 - Baltic ALD-15, Joint meeting, Abstracts},
  language     = {eng},
  location     = {Link{\"o}ping, Sweden},
  title        = {Plasma enhanced atomic layer deposition of silver using the Ag(fod)(PEt\unmatched{2083})-precursor and NH\unmatched{2083}-plasma},
  year         = {2017},
}