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Monte Carlo simulations of ALD on 3D large surface area structures

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Keywords
atomic layer deposition, coating, simulations

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Citation

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MLA
Cremers, Véronique, et al. “Monte Carlo Simulations of ALD on 3D Large Surface Area Structures.” Atomic Layer Deposition, 16th International Conference, Abstracts, 2016.
APA
Cremers, V., Geenen, F., Detavernier, C., & Dendooven, J. (2016). Monte Carlo simulations of ALD on 3D large surface area structures. Atomic Layer Deposition, 16th International Conference, Abstracts. Presented at the 16th International conference on Atomic Layer Deposition (ALD 2016), Dublin, Ireland.
Chicago author-date
Cremers, Véronique, Filip Geenen, Christophe Detavernier, and Jolien Dendooven. 2016. “Monte Carlo Simulations of ALD on 3D Large Surface Area Structures.” In Atomic Layer Deposition, 16th International Conference, Abstracts.
Chicago author-date (all authors)
Cremers, Véronique, Filip Geenen, Christophe Detavernier, and Jolien Dendooven. 2016. “Monte Carlo Simulations of ALD on 3D Large Surface Area Structures.” In Atomic Layer Deposition, 16th International Conference, Abstracts.
Vancouver
1.
Cremers V, Geenen F, Detavernier C, Dendooven J. Monte Carlo simulations of ALD on 3D large surface area structures. In: Atomic Layer Deposition, 16th International conference, Abstracts. 2016.
IEEE
[1]
V. Cremers, F. Geenen, C. Detavernier, and J. Dendooven, “Monte Carlo simulations of ALD on 3D large surface area structures,” in Atomic Layer Deposition, 16th International conference, Abstracts, Dublin, Ireland, 2016.
@inproceedings{8538407,
  author       = {{Cremers, Véronique and Geenen, Filip and Detavernier, Christophe and Dendooven, Jolien}},
  booktitle    = {{Atomic Layer Deposition, 16th International conference, Abstracts}},
  keywords     = {{atomic layer deposition,coating,simulations}},
  language     = {{eng}},
  location     = {{Dublin, Ireland}},
  title        = {{Monte Carlo simulations of ALD on 3D large surface area structures}},
  year         = {{2016}},
}