Monte Carlo simulations of ALD on 3D large surface area structures
- Author
- Véronique Cremers (UGent) , Filip Geenen (UGent) , Christophe Detavernier (UGent) and Jolien Dendooven (UGent)
- Organization
- Keywords
- atomic layer deposition, coating, simulations
Downloads
-
ALDep2016 0128.docx
- full text
- |
- open access
- |
- Word
- |
- 317.90 KB
Citation
Please use this url to cite or link to this publication: http://hdl.handle.net/1854/LU-8538407
- MLA
- Cremers, Véronique, et al. “Monte Carlo Simulations of ALD on 3D Large Surface Area Structures.” Atomic Layer Deposition, 16th International Conference, Abstracts, 2016.
- APA
- Cremers, V., Geenen, F., Detavernier, C., & Dendooven, J. (2016). Monte Carlo simulations of ALD on 3D large surface area structures. Atomic Layer Deposition, 16th International Conference, Abstracts. Presented at the 16th International conference on Atomic Layer Deposition (ALD 2016), Dublin, Ireland.
- Chicago author-date
- Cremers, Véronique, Filip Geenen, Christophe Detavernier, and Jolien Dendooven. 2016. “Monte Carlo Simulations of ALD on 3D Large Surface Area Structures.” In Atomic Layer Deposition, 16th International Conference, Abstracts.
- Chicago author-date (all authors)
- Cremers, Véronique, Filip Geenen, Christophe Detavernier, and Jolien Dendooven. 2016. “Monte Carlo Simulations of ALD on 3D Large Surface Area Structures.” In Atomic Layer Deposition, 16th International Conference, Abstracts.
- Vancouver
- 1.Cremers V, Geenen F, Detavernier C, Dendooven J. Monte Carlo simulations of ALD on 3D large surface area structures. In: Atomic Layer Deposition, 16th International conference, Abstracts. 2016.
- IEEE
- [1]V. Cremers, F. Geenen, C. Detavernier, and J. Dendooven, “Monte Carlo simulations of ALD on 3D large surface area structures,” in Atomic Layer Deposition, 16th International conference, Abstracts, Dublin, Ireland, 2016.
@inproceedings{8538407, author = {{Cremers, Véronique and Geenen, Filip and Detavernier, Christophe and Dendooven, Jolien}}, booktitle = {{Atomic Layer Deposition, 16th International conference, Abstracts}}, keywords = {{atomic layer deposition,coating,simulations}}, language = {{eng}}, location = {{Dublin, Ireland}}, title = {{Monte Carlo simulations of ALD on 3D large surface area structures}}, year = {{2016}}, }