Ghent University Academic Bibliography

Advanced

In Situ IR Spectroscopic Investigation of Thermal and Plasma-Enhanced ALD of Pt: Temperature Dependency of the Growth Rate

Michiel Van Daele UGent, Christophe Detavernier UGent and Jolien Dendooven UGent (2017)
abstract
ALD growth of noble metals is often achieved in a combustion-type chemistry using O2, O3 or O2 plasma as the non-metal precursor. In recent years, the O2-based processes of Pt using the MeCpPtMe3 precursor have been extensively studied and have become a model system for oxidative noble metal ALD processes. The thermal Pt process, using molecular O2, is characterized by a narrow temperature window, while the plasma-enhanced Pt process has a much larger temperature window. An intriguing question is why the growth quickly diminishes below 250°C for the thermal ALD process. Based on surface science and catalysis literature, it has been suggested that Me and MeCp precursor ligands dehydrogenate on the catalytic Pt surface and form a carbonaceous layer causing poisoning of the surface. In this work in situ reflection IR spectroscopy is used during O2-based thermal and plasma-enhanced Pt ALD processes at different deposition temperatures. This offers insights in the breakdown of the ligands of the Pt precursor on a Pt surface. At low temperatures (<= 100°C) the Cp ring remains intact after adsorption on the surface, molecular O2 cannot break the Cp ring but this is possible with O2 plasma however this leads to the formation of PtO2. For higher temperatures (> 100°C) the Cp ring opens and undergoes “restructuring”. Dehydrogenation of the Me species is found to increase with substrate temperature. The IR data thus support the mechanism that was proposed by Mackus et al. based on comparisons with thermal programmed desorption studies of methyl and cyclic hydrocarbon species.
Please use this url to cite or link to this publication:
author
organization
year
type
conference (meetingAbstract)
publication status
published
conference name
EuroCVD 21 – Baltic ALD 15, Joint meeting
conference location
Linköping
conference start
2017-06-11
conference end
2017-06-14
UGent publication?
yes
classification
U
copyright statement
I don't know the status of the copyright for this publication
id
8536895
handle
http://hdl.handle.net/1854/LU-8536895
date created
2017-11-10 10:16:58
date last changed
2017-11-10 10:22:37
@inproceedings{8536895,
  abstract     = {ALD growth of noble metals is often achieved in a combustion-type chemistry using O2, O3 or O2 plasma as the non-metal precursor. In recent years, the O2-based processes of Pt using the MeCpPtMe3 precursor have been extensively studied and have become a model system for oxidative noble metal ALD processes. The thermal Pt process, using molecular O2, is characterized by a narrow temperature window, while the plasma-enhanced Pt process has a much larger temperature window. An intriguing question is why the growth quickly diminishes below 250{\textdegree}C for the thermal ALD process. Based on surface science and catalysis literature, it has been suggested that Me and MeCp precursor ligands dehydrogenate on the catalytic Pt surface and form a carbonaceous layer causing poisoning of the surface. In this work in situ reflection IR spectroscopy is used during O2-based thermal and plasma-enhanced Pt ALD processes at different deposition temperatures. This offers insights in the breakdown of the ligands of the Pt precursor on a Pt surface. At low temperatures ({\textlangle}= 100{\textdegree}C) the Cp ring remains intact after adsorption on the surface, molecular O2 cannot break the Cp ring but this is possible with O2 plasma however this leads to the formation of PtO2. For higher temperatures ({\textrangle} 100{\textdegree}C) the Cp ring opens and undergoes {\textquotedblleft}restructuring{\textquotedblright}. Dehydrogenation of the Me species is found to increase with substrate temperature. The IR data thus support the mechanism that was proposed by Mackus et al.  based on comparisons with thermal programmed desorption studies of methyl and cyclic hydrocarbon species.},
  author       = {Van Daele, Michiel and Detavernier, Christophe and Dendooven, Jolien},
  location     = {Link{\"o}ping},
  title        = {In Situ IR Spectroscopic Investigation of Thermal and Plasma-Enhanced ALD of Pt: Temperature Dependency of the Growth Rate},
  year         = {2017},
}

Chicago
Van Daele, Michiel, Christophe Detavernier, and Jolien Dendooven. 2017. “In Situ IR Spectroscopic Investigation of Thermal and Plasma-Enhanced ALD of Pt: Temperature Dependency of the Growth Rate.” In .
APA
Van Daele, Michiel, Detavernier, C., & Dendooven, J. (2017). In Situ IR Spectroscopic Investigation of Thermal and Plasma-Enhanced ALD of Pt: Temperature Dependency of the Growth Rate. Presented at the EuroCVD 21 – Baltic ALD 15, Joint meeting.
Vancouver
1.
Van Daele M, Detavernier C, Dendooven J. In Situ IR Spectroscopic Investigation of Thermal and Plasma-Enhanced ALD of Pt: Temperature Dependency of the Growth Rate. 2017.
MLA
Van Daele, Michiel, Christophe Detavernier, and Jolien Dendooven. “In Situ IR Spectroscopic Investigation of Thermal and Plasma-Enhanced ALD of Pt: Temperature Dependency of the Growth Rate.” 2017. Print.