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In situ IR spectroscopic investigation of thermal and plasma-enhanced ALD of Pt : temperature dependency of the growth rate

Michiel Van Daele UGent, Christophe Detavernier UGent and Jolien Dendooven UGent (2017) EuroCVD-21 - Baltic ALD-15, Joint meeting, Abstracts.
Please use this url to cite or link to this publication:
author
organization
year
type
conference (meetingAbstract)
publication status
published
subject
in
EuroCVD-21 - Baltic ALD-15, Joint meeting, Abstracts
conference name
Joint meeting EuroCVD-21 - Baltic ALD-15
conference location
Linköping, Sweden
conference start
2017-06-11
conference end
2017-06-14
language
English
UGent publication?
yes
classification
C3
copyright statement
I have transferred the copyright for this publication to the publisher
id
8536895
handle
http://hdl.handle.net/1854/LU-8536895
date created
2017-11-10 10:16:58
date last changed
2017-12-08 09:53:40
@inproceedings{8536895,
  author       = {Van Daele, Michiel and Detavernier, Christophe and Dendooven, Jolien},
  booktitle    = {EuroCVD-21 - Baltic ALD-15, Joint meeting, Abstracts},
  language     = {eng},
  location     = {Link{\"o}ping, Sweden},
  title        = {In situ IR spectroscopic investigation of thermal and plasma-enhanced ALD of Pt : temperature dependency of the growth rate},
  year         = {2017},
}

Chicago
Van Daele, Michiel, Christophe Detavernier, and Jolien Dendooven. 2017. “In Situ IR Spectroscopic Investigation of Thermal and Plasma-enhanced ALD of Pt : Temperature Dependency of the Growth Rate.” In EuroCVD-21 - Baltic ALD-15, Joint Meeting, Abstracts.
APA
Van Daele, Michiel, Detavernier, C., & Dendooven, J. (2017). In situ IR spectroscopic investigation of thermal and plasma-enhanced ALD of Pt : temperature dependency of the growth rate. EuroCVD-21 - Baltic ALD-15, Joint meeting, Abstracts. Presented at the Joint  meeting EuroCVD-21 - Baltic ALD-15.
Vancouver
1.
Van Daele M, Detavernier C, Dendooven J. In situ IR spectroscopic investigation of thermal and plasma-enhanced ALD of Pt : temperature dependency of the growth rate. EuroCVD-21 - Baltic ALD-15, Joint meeting, Abstracts. 2017.
MLA
Van Daele, Michiel, Christophe Detavernier, and Jolien Dendooven. “In Situ IR Spectroscopic Investigation of Thermal and Plasma-enhanced ALD of Pt : Temperature Dependency of the Growth Rate.” EuroCVD-21 - Baltic ALD-15, Joint Meeting, Abstracts. 2017. Print.