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In situ IR spectroscopic investigation of thermal and plasma-enhanced ALD of Pt : temperature dependency of the growth rate

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Chicago
Van Daele, Michiel, Christophe Detavernier, and Jolien Dendooven. 2017. “In Situ IR Spectroscopic Investigation of Thermal and Plasma-enhanced ALD of Pt : Temperature Dependency of the Growth Rate.” In EuroCVD-21 - Baltic ALD-15, Joint Meeting, Abstracts.
APA
Van Daele, Michiel, Detavernier, C., & Dendooven, J. (2017). In situ IR spectroscopic investigation of thermal and plasma-enhanced ALD of Pt : temperature dependency of the growth rate. EuroCVD-21 - Baltic ALD-15, Joint meeting, Abstracts. Presented at the Joint  meeting EuroCVD-21 - Baltic ALD-15.
Vancouver
1.
Van Daele M, Detavernier C, Dendooven J. In situ IR spectroscopic investigation of thermal and plasma-enhanced ALD of Pt : temperature dependency of the growth rate. EuroCVD-21 - Baltic ALD-15, Joint meeting, Abstracts. 2017.
MLA
Van Daele, Michiel, Christophe Detavernier, and Jolien Dendooven. “In Situ IR Spectroscopic Investigation of Thermal and Plasma-enhanced ALD of Pt : Temperature Dependency of the Growth Rate.” EuroCVD-21 - Baltic ALD-15, Joint Meeting, Abstracts. 2017. Print.
@inproceedings{8536895,
  author       = {Van Daele, Michiel and Detavernier, Christophe and Dendooven, Jolien},
  booktitle    = {EuroCVD-21 - Baltic ALD-15, Joint meeting, Abstracts},
  language     = {eng},
  location     = {Link{\"o}ping, Sweden},
  title        = {In situ IR spectroscopic investigation of thermal and plasma-enhanced ALD of Pt : temperature dependency of the growth rate},
  year         = {2017},
}