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PE-ALD of lithium aluminum silicon oxide solid electrolyte layers using LiHMDS

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Chicago
Werbrouck, Andreas, Thomas Dobbelaere, Felix Mattelaer, and Christophe Detavernier. 2017. “PE-ALD of Lithium Aluminum Silicon Oxide Solid Electrolyte Layers Using LiHMDS.” In EuroCVD-21 - Baltic ALD-15, Joint Meeting, Abstracts.
APA
Werbrouck, Andreas, Dobbelaere, T., Mattelaer, F., & Detavernier, C. (2017). PE-ALD of lithium aluminum silicon oxide solid electrolyte layers using LiHMDS. EuroCVD-21 - Baltic ALD-15, Joint meeting, Abstracts. Presented at the Joint  meeting EuroCVD-21 - Baltic ALD-15.
Vancouver
1.
Werbrouck A, Dobbelaere T, Mattelaer F, Detavernier C. PE-ALD of lithium aluminum silicon oxide solid electrolyte layers using LiHMDS. EuroCVD-21 - Baltic ALD-15, Joint meeting, Abstracts. 2017.
MLA
Werbrouck, Andreas, Thomas Dobbelaere, Felix Mattelaer, et al. “PE-ALD of Lithium Aluminum Silicon Oxide Solid Electrolyte Layers Using LiHMDS.” EuroCVD-21 - Baltic ALD-15, Joint Meeting, Abstracts. 2017. Print.
@inproceedings{8536397,
  author       = {Werbrouck, Andreas and Dobbelaere, Thomas and Mattelaer, Felix and Detavernier, Christophe},
  booktitle    = {EuroCVD-21 - Baltic ALD-15, Joint meeting, Abstracts},
  language     = {eng},
  location     = {Link{\"o}ping, Sweden},
  title        = {PE-ALD of lithium aluminum silicon oxide solid electrolyte layers using LiHMDS},
  year         = {2017},
}