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Ultrathin epitaxial silicides for semiconductor contacts

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Chicago
Geenen, Filip, Cristian Mocuta, and Christophe Detavernier. 2017. “Ultrathin Epitaxial Silicides for Semiconductor Contacts.” In ECS Meeting Abstracts. Pennington, NJ, USA: The Electrochemical Society (ECS).
APA
Geenen, F., Mocuta, C., & Detavernier, C. (2017). Ultrathin epitaxial silicides for semiconductor contacts. ECS Meeting abstracts. Presented at the 232nd ECS Meeting, Pennington, NJ, USA: The Electrochemical Society (ECS).
Vancouver
1.
Geenen F, Mocuta C, Detavernier C. Ultrathin epitaxial silicides for semiconductor contacts. ECS Meeting abstracts. Pennington, NJ, USA: The Electrochemical Society (ECS); 2017.
MLA
Geenen, Filip, Cristian Mocuta, and Christophe Detavernier. “Ultrathin Epitaxial Silicides for Semiconductor Contacts.” ECS Meeting Abstracts. Pennington, NJ, USA: The Electrochemical Society (ECS), 2017. Print.
@inproceedings{8536313,
  articleno    = {abstract MA2017-02\_1120},
  author       = {Geenen, Filip and Mocuta, Cristian and Detavernier, Christophe},
  booktitle    = {ECS Meeting abstracts},
  issn         = {2151-2041},
  language     = {eng},
  location     = {National Harbor, MD, USA},
  publisher    = {The Electrochemical Society (ECS)},
  title        = {Ultrathin epitaxial silicides for semiconductor contacts},
  url          = {http://ma.ecsdl.org/content/MA2017-02/26/1120.short?cited-by=yes\&legid=ecsmtgabs;MA2017-02/26/1120},
  year         = {2017},
}