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Ultrathin epitaxial silicides for semiconductor contacts

Filip Geenen UGent, Cristian Mocuta and Christophe Detavernier UGent (2017) ECS Meeting abstracts.
Please use this url to cite or link to this publication:
author
organization
year
type
conference (meetingAbstract)
publication status
published
subject
in
ECS Meeting abstracts
article number
abstract MA2017-02_1120
publisher
The Electrochemical Society (ECS)
place of publication
Pennington, NJ, USA
conference name
232nd ECS Meeting
conference location
National Harbor, MD, USA
conference start
2017-10-01
conference end
2017-10-05
ISSN
2151-2041
language
English
UGent publication?
yes
classification
C3
additional info
invited contribution
id
8536313
handle
http://hdl.handle.net/1854/LU-8536313
alternative location
http://ma.ecsdl.org/content/MA2017-02/26/1120.short?cited-by=yes&legid=ecsmtgabs;MA2017-02/26/1120
date created
2017-11-06 12:47:10
date last changed
2017-12-04 13:26:35
@inproceedings{8536313,
  articleno    = {abstract MA2017-02\_1120},
  author       = {Geenen, Filip and Mocuta, Cristian and Detavernier, Christophe},
  booktitle    = {ECS Meeting abstracts},
  issn         = {2151-2041},
  language     = {eng},
  location     = {National Harbor, MD, USA},
  publisher    = {The Electrochemical Society (ECS)},
  title        = {Ultrathin epitaxial silicides for semiconductor contacts},
  url          = {http://ma.ecsdl.org/content/MA2017-02/26/1120.short?cited-by=yes\&legid=ecsmtgabs;MA2017-02/26/1120},
  year         = {2017},
}

Chicago
Geenen, Filip, Cristian Mocuta, and Christophe Detavernier. 2017. “Ultrathin Epitaxial Silicides for Semiconductor Contacts.” In ECS Meeting Abstracts. Pennington, NJ, USA: The Electrochemical Society (ECS).
APA
Geenen, F., Mocuta, C., & Detavernier, C. (2017). Ultrathin epitaxial silicides for semiconductor contacts. ECS Meeting abstracts. Presented at the 232nd ECS Meeting, Pennington, NJ, USA: The Electrochemical Society (ECS).
Vancouver
1.
Geenen F, Mocuta C, Detavernier C. Ultrathin epitaxial silicides for semiconductor contacts. ECS Meeting abstracts. Pennington, NJ, USA: The Electrochemical Society (ECS); 2017.
MLA
Geenen, Filip, Cristian Mocuta, and Christophe Detavernier. “Ultrathin Epitaxial Silicides for Semiconductor Contacts.” ECS Meeting Abstracts. Pennington, NJ, USA: The Electrochemical Society (ECS), 2017. Print.