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Plasma enhanced atomic layer deposition of zinc sulfide

Jakob Kuhs (UGent) , Zeger Hens (UGent) and Christophe Detavernier (UGent)
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Chicago
Kuhs, Jakob, Zeger Hens, and Christophe Detavernier. 2016. “Plasma Enhanced Atomic Layer Deposition of Zinc Sulfide.” In Atomic Layer Deposition, 16th International Conference, Abstracts.
APA
Kuhs, J., Hens, Z., & Detavernier, C. (2016). Plasma enhanced atomic layer deposition of zinc sulfide. Atomic Layer Deposition, 16th International conference, Abstracts. Presented at the 16th International conference on Atomic Layer Deposition (ALD 2016).
Vancouver
1.
Kuhs J, Hens Z, Detavernier C. Plasma enhanced atomic layer deposition of zinc sulfide. Atomic Layer Deposition, 16th International conference, Abstracts. 2016.
MLA
Kuhs, Jakob, Zeger Hens, and Christophe Detavernier. “Plasma Enhanced Atomic Layer Deposition of Zinc Sulfide.” Atomic Layer Deposition, 16th International Conference, Abstracts. 2016. Print.
@inproceedings{8536310,
  author       = {Kuhs, Jakob and Hens, Zeger and Detavernier, Christophe},
  booktitle    = {Atomic Layer Deposition, 16th International conference, Abstracts},
  language     = {eng},
  location     = {Dublin, Ireland},
  title        = {Plasma enhanced atomic layer deposition of zinc sulfide},
  year         = {2016},
}