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Plasma enhanced atomic layer deposition of aluminium sulphide

Jakob Kuhs (UGent) , Zeger Hens (UGent) and Christophe Detavernier (UGent)
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Chicago
Kuhs, Jakob, Zeger Hens, and Christophe Detavernier. 2017. “Plasma Enhanced Atomic Layer Deposition of Aluminium Sulphide.” In EuroCVD-21 - Baltic ALD-15, Joint Meeting, Abstracts.
APA
Kuhs, J., Hens, Z., & Detavernier, C. (2017). Plasma enhanced atomic layer deposition of aluminium sulphide. EuroCVD-21 - Baltic ALD-15, Joint meeting, Abstracts. Presented at the Joint  meeting EuroCVD-21 - Baltic ALD-15.
Vancouver
1.
Kuhs J, Hens Z, Detavernier C. Plasma enhanced atomic layer deposition of aluminium sulphide. EuroCVD-21 - Baltic ALD-15, Joint meeting, Abstracts. 2017.
MLA
Kuhs, Jakob, Zeger Hens, and Christophe Detavernier. “Plasma Enhanced Atomic Layer Deposition of Aluminium Sulphide.” EuroCVD-21 - Baltic ALD-15, Joint Meeting, Abstracts. 2017. Print.
@inproceedings{8536309,
  author       = {Kuhs, Jakob and Hens, Zeger and Detavernier, Christophe},
  booktitle    = {EuroCVD-21 - Baltic ALD-15, Joint meeting, Abstracts},
  language     = {eng},
  location     = {Link{\"o}ping, Sweden},
  title        = {Plasma enhanced atomic layer deposition of aluminium sulphide},
  year         = {2017},
}