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Plasma enhanced atomic layer deposition of aluminium sulphide

Jakob Kuhs UGent, Zeger Hens UGent and Christophe Detavernier UGent (2017) EuroCVD-21 - Baltic ALD-15, Joint meeting, Abstracts.
Please use this url to cite or link to this publication:
author
organization
year
type
conference (meetingAbstract)
publication status
published
subject
in
EuroCVD-21 - Baltic ALD-15, Joint meeting, Abstracts
conference name
Joint meeting EuroCVD-21 - Baltic ALD-15
conference location
Linköping, Sweden
conference start
2017-06-11
conference end
2017-06-14
language
English
UGent publication?
yes
classification
C3
id
8536309
handle
http://hdl.handle.net/1854/LU-8536309
date created
2017-11-06 12:22:21
date last changed
2017-12-08 09:57:09
@inproceedings{8536309,
  author       = {Kuhs, Jakob and Hens, Zeger and Detavernier, Christophe},
  booktitle    = {EuroCVD-21 - Baltic ALD-15, Joint meeting, Abstracts},
  language     = {eng},
  location     = {Link{\"o}ping, Sweden},
  title        = {Plasma enhanced atomic layer deposition of aluminium sulphide},
  year         = {2017},
}

Chicago
Kuhs, Jakob, Zeger Hens, and Christophe Detavernier. 2017. “Plasma Enhanced Atomic Layer Deposition of Aluminium Sulphide.” In EuroCVD-21 - Baltic ALD-15, Joint Meeting, Abstracts.
APA
Kuhs, J., Hens, Z., & Detavernier, C. (2017). Plasma enhanced atomic layer deposition of aluminium sulphide. EuroCVD-21 - Baltic ALD-15, Joint meeting, Abstracts. Presented at the Joint  meeting EuroCVD-21 - Baltic ALD-15.
Vancouver
1.
Kuhs J, Hens Z, Detavernier C. Plasma enhanced atomic layer deposition of aluminium sulphide. EuroCVD-21 - Baltic ALD-15, Joint meeting, Abstracts. 2017.
MLA
Kuhs, Jakob, Zeger Hens, and Christophe Detavernier. “Plasma Enhanced Atomic Layer Deposition of Aluminium Sulphide.” EuroCVD-21 - Baltic ALD-15, Joint Meeting, Abstracts. 2017. Print.