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Texture evolution during solid-state reactions - silicides and germanides

Filip Geenen UGent, Koen De Keyser UGent, Davy Deduytsche UGent, Bob De Schutter UGent and Christophe Detavernier UGent (2017)
abstract
Silicides and germanides compounds are formed out of a metal and silicon or germanium. In the microelectronics industry, silicides are the preferred material for electrically contacting silicon-based source and drain regions, while germanides are considered as a top candidate for contacting future germanium-based electronics. These compounds are fabricated through thermal processing of a metal layer on top of the silicon or germanium substrate. The thermodynamic and morphological stability of the formed structure is of utmost importance for the micro-electronics industry in order to create a reliable device. The atomic mobility allows the thin-film structures to optimize their geometry upon annealing in order to lower the total energy. As such, thin uniform silicide films evolve into agglomerated islands upon thermal annealing, which destroys their conductive properties. In this presentation, we elaborate on the discovery of a peculiar correlation between this morphological degradation and the preferential crystallographic orientation of the individual silicide grains. The recently-discovered axiotaxial alignment, which can exist in addition to other textures such as epitaxy and fiber-alignment, plays a crucial role in the agglomeration process. Based on energetic considerations, we explain that the mass transport is expected to occur from randomly- or epitaxially- oriented grains towards axiotaxial grains with a curved interface. De Keyser et al. Appl. of Texture Analysis: Ceramic Transactions 201 (2008): 3 De Schutter, et al. Applied Physics Reviews 3.3 (2016): 031302.
Please use this url to cite or link to this publication:
author
organization
year
type
conference (meetingAbstract)
publication status
published
subject
conference name
International conference on Diffusion in materials
conference organizer
DIMAT
conference location
Haifa, Israel
conference start
2017-05-07
conference end
2017-05-12
UGent publication?
yes
classification
U
copyright statement
I don't know the status of the copyright for this publication
id
8536297
handle
http://hdl.handle.net/1854/LU-8536297
date created
2017-11-06 10:29:09
date last changed
2017-11-06 10:29:09
@inproceedings{8536297,
  abstract     = {Silicides and germanides compounds are formed out of a metal and silicon or germanium. In the microelectronics industry, silicides are the preferred material for electrically contacting silicon-based source and drain regions, while germanides are considered as a top candidate for contacting future germanium-based electronics. These compounds are fabricated through thermal processing of a metal layer on top of the silicon or germanium substrate. The thermodynamic and morphological stability of the formed structure is of utmost importance for the micro-electronics industry in order to create a reliable device. The atomic mobility allows the thin-film structures to optimize their geometry upon annealing in order to lower the total energy. As such, thin uniform silicide films evolve into agglomerated islands upon thermal annealing, which destroys their conductive properties.
In this presentation, we elaborate on the discovery of a peculiar correlation between this morphological degradation and the preferential crystallographic orientation of the individual silicide grains. The recently-discovered axiotaxial alignment, which can exist in addition to other textures such as epitaxy and fiber-alignment, plays a crucial role in the agglomeration process. Based on energetic considerations, we explain that the mass transport is expected to occur from randomly- or epitaxially- oriented grains towards axiotaxial grains with a curved interface.
De Keyser et al. Appl. of Texture Analysis: Ceramic Transactions 201 (2008): 3
De Schutter, et al. Applied Physics Reviews 3.3 (2016): 031302.},
  author       = {Geenen, Filip and De Keyser, Koen and Deduytsche, Davy and De Schutter, Bob and Detavernier, Christophe},
  location     = {Haifa, Israel},
  title        = {Texture evolution during solid-state reactions - silicides and germanides},
  year         = {2017},
}

Chicago
Geenen, Filip, Koen De Keyser, Davy Deduytsche, Bob De Schutter, and Christophe Detavernier. 2017. “Texture Evolution During Solid-state Reactions - Silicides and Germanides.” In .
APA
Geenen, F., De Keyser, K., Deduytsche, D., De Schutter, B., & Detavernier, C. (2017). Texture evolution during solid-state reactions - silicides and germanides. Presented at the International conference on Diffusion in materials.
Vancouver
1.
Geenen F, De Keyser K, Deduytsche D, De Schutter B, Detavernier C. Texture evolution during solid-state reactions - silicides and germanides. 2017.
MLA
Geenen, Filip, Koen De Keyser, Davy Deduytsche, et al. “Texture Evolution During Solid-state Reactions - Silicides and Germanides.” 2017. Print.