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Basics of Atomic Layer Deposition: Growth Characteristics and Conformality

Jolien Dendooven UGent and Christophe Detavernier UGent (2017) Atomic Layer Deposition in Energy Conversion Applications. p.1-39
Please use this url to cite or link to this publication:
author
organization
year
type
bookChapter
publication status
published
book title
Atomic Layer Deposition in Energy Conversion Applications
editor
Julien Bachmann
pages
1 - 39
publisher
Wiley
UGent publication?
yes
classification
U
copyright statement
I don't know the status of the copyright for this publication
id
8536186
handle
http://hdl.handle.net/1854/LU-8536186
date created
2017-11-03 12:22:11
date last changed
2017-11-03 12:22:11
@incollection{8536186,
  author       = {Dendooven, Jolien and Detavernier, Christophe},
  booktitle    = {Atomic Layer Deposition in Energy Conversion Applications},
  editor       = {Bachmann, Julien},
  pages        = {1--39},
  publisher    = {Wiley},
  title        = {Basics of Atomic Layer Deposition: Growth Characteristics and Conformality},
  year         = {2017},
}

Chicago
Dendooven, Jolien, and Christophe Detavernier. 2017. “Basics of Atomic Layer Deposition: Growth Characteristics and Conformality.” In Atomic Layer Deposition in Energy Conversion Applications, ed. Julien Bachmann, 1–39. Wiley.
APA
Dendooven, J., & Detavernier, C. (2017). Basics of Atomic Layer Deposition: Growth Characteristics and Conformality. In J. Bachmann (Ed.), Atomic Layer Deposition in Energy Conversion Applications (pp. 1–39). Wiley.
Vancouver
1.
Dendooven J, Detavernier C. Basics of Atomic Layer Deposition: Growth Characteristics and Conformality. In: Bachmann J, editor. Atomic Layer Deposition in Energy Conversion Applications. Wiley; 2017. p. 1–39.
MLA
Dendooven, Jolien, and Christophe Detavernier. “Basics of Atomic Layer Deposition: Growth Characteristics and Conformality.” Atomic Layer Deposition in Energy Conversion Applications. Ed. Julien Bachmann. Wiley, 2017. 1–39. Print.