Basics of atomic layer deposition : growth characteristics and conformality
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- Jolien Dendooven (UGent) and Christophe Detavernier (UGent)
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Please use this url to cite or link to this publication: http://hdl.handle.net/1854/LU-8536186
- MLA
- Dendooven, Jolien, and Christophe Detavernier. “Basics of Atomic Layer Deposition : Growth Characteristics and Conformality.” Atomic Layer Deposition in Energy Conversion Applications, edited by Julien Bachmann, Wiley-VCH, 2017, pp. 3–40, doi:10.1002/9783527694822.ch1.
- APA
- Dendooven, J., & Detavernier, C. (2017). Basics of atomic layer deposition : growth characteristics and conformality. In J. Bachmann (Ed.), Atomic layer deposition in energy conversion applications (pp. 3–40). https://doi.org/10.1002/9783527694822.ch1
- Chicago author-date
- Dendooven, Jolien, and Christophe Detavernier. 2017. “Basics of Atomic Layer Deposition : Growth Characteristics and Conformality.” In Atomic Layer Deposition in Energy Conversion Applications, edited by Julien Bachmann, 3–40. Weinheim, Germany: Wiley-VCH. https://doi.org/10.1002/9783527694822.ch1.
- Chicago author-date (all authors)
- Dendooven, Jolien, and Christophe Detavernier. 2017. “Basics of Atomic Layer Deposition : Growth Characteristics and Conformality.” In Atomic Layer Deposition in Energy Conversion Applications, ed by. Julien Bachmann, 3–40. Weinheim, Germany: Wiley-VCH. doi:10.1002/9783527694822.ch1.
- Vancouver
- 1.Dendooven J, Detavernier C. Basics of atomic layer deposition : growth characteristics and conformality. In: Bachmann J, editor. Atomic layer deposition in energy conversion applications. Weinheim, Germany: Wiley-VCH; 2017. p. 3–40.
- IEEE
- [1]J. Dendooven and C. Detavernier, “Basics of atomic layer deposition : growth characteristics and conformality,” in Atomic layer deposition in energy conversion applications, J. Bachmann, Ed. Weinheim, Germany: Wiley-VCH, 2017, pp. 3–40.
@incollection{8536186, author = {{Dendooven, Jolien and Detavernier, Christophe}}, booktitle = {{Atomic layer deposition in energy conversion applications}}, editor = {{Bachmann, Julien}}, isbn = {{9783527339129}}, language = {{eng}}, pages = {{3--40}}, publisher = {{Wiley-VCH}}, title = {{Basics of atomic layer deposition : growth characteristics and conformality}}, url = {{http://doi.org/10.1002/9783527694822.ch1}}, year = {{2017}}, }
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