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Basics of atomic layer deposition : growth characteristics and conformality

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MLA
Dendooven, Jolien, and Christophe Detavernier. “Basics of Atomic Layer Deposition : Growth Characteristics and Conformality.” Atomic Layer Deposition in Energy Conversion Applications, edited by Julien Bachmann, Wiley-VCH, 2017, pp. 3–40, doi:10.1002/9783527694822.ch1.
APA
Dendooven, J., & Detavernier, C. (2017). Basics of atomic layer deposition : growth characteristics and conformality. In J. Bachmann (Ed.), Atomic layer deposition in energy conversion applications (pp. 3–40). https://doi.org/10.1002/9783527694822.ch1
Chicago author-date
Dendooven, Jolien, and Christophe Detavernier. 2017. “Basics of Atomic Layer Deposition : Growth Characteristics and Conformality.” In Atomic Layer Deposition in Energy Conversion Applications, edited by Julien Bachmann, 3–40. Weinheim, Germany: Wiley-VCH. https://doi.org/10.1002/9783527694822.ch1.
Chicago author-date (all authors)
Dendooven, Jolien, and Christophe Detavernier. 2017. “Basics of Atomic Layer Deposition : Growth Characteristics and Conformality.” In Atomic Layer Deposition in Energy Conversion Applications, ed by. Julien Bachmann, 3–40. Weinheim, Germany: Wiley-VCH. doi:10.1002/9783527694822.ch1.
Vancouver
1.
Dendooven J, Detavernier C. Basics of atomic layer deposition : growth characteristics and conformality. In: Bachmann J, editor. Atomic layer deposition in energy conversion applications. Weinheim, Germany: Wiley-VCH; 2017. p. 3–40.
IEEE
[1]
J. Dendooven and C. Detavernier, “Basics of atomic layer deposition : growth characteristics and conformality,” in Atomic layer deposition in energy conversion applications, J. Bachmann, Ed. Weinheim, Germany: Wiley-VCH, 2017, pp. 3–40.
@incollection{8536186,
  author       = {{Dendooven, Jolien and Detavernier, Christophe}},
  booktitle    = {{Atomic layer deposition in energy conversion applications}},
  editor       = {{Bachmann, Julien}},
  isbn         = {{9783527339129}},
  language     = {{eng}},
  pages        = {{3--40}},
  publisher    = {{Wiley-VCH}},
  title        = {{Basics of atomic layer deposition : growth characteristics and conformality}},
  url          = {{http://doi.org/10.1002/9783527694822.ch1}},
  year         = {{2017}},
}

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