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Plasma-enhanced atomic layer deposition of transition metal phosphates

(2017)
Author
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(UGent) and Philippe Vereecken
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Citation

Please use this url to cite or link to this publication:

Chicago
Dobbelaere, Thomas. 2017. “Plasma-enhanced Atomic Layer Deposition of Transition Metal Phosphates”. Ghent, Belgium: Ghent University. Faculty of Sciences.
APA
Dobbelaere, T. (2017). Plasma-enhanced atomic layer deposition of transition metal phosphates. Ghent University. Faculty of Sciences, Ghent, Belgium.
Vancouver
1.
Dobbelaere T. Plasma-enhanced atomic layer deposition of transition metal phosphates. [Ghent, Belgium]: Ghent University. Faculty of Sciences; 2017.
MLA
Dobbelaere, Thomas. “Plasma-enhanced Atomic Layer Deposition of Transition Metal Phosphates.” 2017 : n. pag. Print.
@phdthesis{8534242,
  author       = {Dobbelaere, Thomas},
  language     = {eng},
  pages        = {XX, 219},
  publisher    = {Ghent University. Faculty of Sciences},
  school       = {Ghent University},
  title        = {Plasma-enhanced atomic layer deposition of transition metal phosphates},
  year         = {2017},
}