Ghent University Academic Bibliography

Advanced

Plasma enhanced atomic layer deposition of zinc sulfide thin films

Jakob Kuhs UGent, Thomas Dobbelaere UGent, Zeger Hens UGent and Christophe Detavernier UGent (2017) JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A. 35(1).
Please use this url to cite or link to this publication:
author
organization
year
type
journalArticle (original)
publication status
published
subject
keyword
P-TYPE TRANSPARENT, HYDROGEN-SULFIDE, ARC SPECTRUM, SOLAR-CELLS, ZNS, EPITAXY, SULFUR
journal title
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
J. Vac. Sci. Technol. A
volume
35
issue
1
article number
01B111
pages
7 pages
Web of Science type
Article
Web of Science id
000392120900016
ISSN
0734-2101
1520-8559
DOI
10.1116/1.4967724
language
English
UGent publication?
yes
classification
A1
copyright statement
I have transferred the copyright for this publication to the publisher
id
8510067
handle
http://hdl.handle.net/1854/LU-8510067
date created
2017-02-17 16:25:07
date last changed
2017-07-25 12:21:25
@article{8510067,
  articleno    = {01B111},
  author       = {Kuhs, Jakob and Dobbelaere, Thomas and Hens, Zeger and Detavernier, Christophe},
  issn         = {0734-2101},
  journal      = {JOURNAL OF VACUUM SCIENCE \& TECHNOLOGY A},
  keyword      = {P-TYPE TRANSPARENT,HYDROGEN-SULFIDE,ARC SPECTRUM,SOLAR-CELLS,ZNS,EPITAXY,SULFUR},
  language     = {eng},
  number       = {1},
  pages        = {7},
  title        = {Plasma enhanced atomic layer deposition of zinc sulfide thin films},
  url          = {http://dx.doi.org/10.1116/1.4967724},
  volume       = {35},
  year         = {2017},
}

Chicago
Kuhs, Jakob, Thomas Dobbelaere, Zeger Hens, and Christophe Detavernier. 2017. “Plasma Enhanced Atomic Layer Deposition of Zinc Sulfide Thin Films.” Journal of Vacuum Science & Technology A 35 (1).
APA
Kuhs, J., Dobbelaere, T., Hens, Z., & Detavernier, C. (2017). Plasma enhanced atomic layer deposition of zinc sulfide thin films. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 35(1).
Vancouver
1.
Kuhs J, Dobbelaere T, Hens Z, Detavernier C. Plasma enhanced atomic layer deposition of zinc sulfide thin films. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A. 2017;35(1).
MLA
Kuhs, Jakob, Thomas Dobbelaere, Zeger Hens, et al. “Plasma Enhanced Atomic Layer Deposition of Zinc Sulfide Thin Films.” JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 35.1 (2017): n. pag. Print.