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CMOS-compatible silicon nitride spectrometers for lab-on-a-chip spectral sensing

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Abstract
We report on miniaturized optical spectrometers integrated on a photonic integrated circuit (PIC) platform based on silicon nitride waveguides and fabricated in a CMOS-compatible approach. As compared to a silicon on -insulator PIC-platform, the usage of silicon nitride allows for operation in the visible and near infrared. Furthermore, the moderately high refractive index contrast in silicon -nitride photonic wire waveguides provides a valuable compromise between compactness, optical loss and sensitivity to phase error. Three generic types of on -chip spectrometers are discussed: the arrayed waveguide grating (AWG) spectrometer, the echelle grating or planar concave grating (PCG) spectrometer and the stationary Fourier transform spectrometer (FTS) spectrometer. Both the design as well as experimental results are presented and discussed. For the FTS spectrometer a specific design is described in detail leading to an ultra -small (0.1 mm2) footprint device with a resolution of 1 nm and a spectral range of 100nm. Examples are given of the usage of these spectrometers in refractive index biosensing, absorption spectroscopy and Raman spectroscopy.
Keywords
Integrated photonics, miniature spectrometers, absorption spectroscopy, Raman spectroscopy, silicon, silicon-nitride

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Citation

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MLA
Ryckeboer, Eva, et al. “CMOS-Compatible Silicon Nitride Spectrometers for Lab-on-a-Chip Spectral Sensing.” SILICON PHOTONICS AND PHOTONIC INTEGRATED CIRCUITS V, vol. 9891, SPIE, 2016, doi:10.1117/12.2234978.
APA
Ryckeboer, E., Nie, X., Subramanian, A., Martens, D., Bienstman, P., Clemmen, S., … Baets, R. (2016). CMOS-compatible silicon nitride spectrometers for lab-on-a-chip spectral sensing. SILICON PHOTONICS AND PHOTONIC INTEGRATED CIRCUITS V, 9891. https://doi.org/10.1117/12.2234978
Chicago author-date
Ryckeboer, Eva, Xiaomin Nie, Ananth Subramanian, Daan Martens, Peter Bienstman, Stéphane Clemmen, Simone Severi, Roelof Jansen, Günther Roelkens, and Roel Baets. 2016. “CMOS-Compatible Silicon Nitride Spectrometers for Lab-on-a-Chip Spectral Sensing.” In SILICON PHOTONICS AND PHOTONIC INTEGRATED CIRCUITS V. Vol. 9891. Bellingham: SPIE. https://doi.org/10.1117/12.2234978.
Chicago author-date (all authors)
Ryckeboer, Eva, Xiaomin Nie, Ananth Subramanian, Daan Martens, Peter Bienstman, Stéphane Clemmen, Simone Severi, Roelof Jansen, Günther Roelkens, and Roel Baets. 2016. “CMOS-Compatible Silicon Nitride Spectrometers for Lab-on-a-Chip Spectral Sensing.” In SILICON PHOTONICS AND PHOTONIC INTEGRATED CIRCUITS V. Vol. 9891. Bellingham: SPIE. doi:10.1117/12.2234978.
Vancouver
1.
Ryckeboer E, Nie X, Subramanian A, Martens D, Bienstman P, Clemmen S, et al. CMOS-compatible silicon nitride spectrometers for lab-on-a-chip spectral sensing. In: SILICON PHOTONICS AND PHOTONIC INTEGRATED CIRCUITS V. Bellingham: SPIE; 2016.
IEEE
[1]
E. Ryckeboer et al., “CMOS-compatible silicon nitride spectrometers for lab-on-a-chip spectral sensing,” in SILICON PHOTONICS AND PHOTONIC INTEGRATED CIRCUITS V, Brussels, BELGIUM, 2016, vol. 9891.
@inproceedings{8507408,
  abstract     = {{We report on miniaturized optical spectrometers integrated on a photonic integrated circuit (PIC) platform based on silicon nitride waveguides and fabricated in a CMOS-compatible approach. As compared to a silicon on -insulator PIC-platform, the usage of silicon nitride allows for operation in the visible and near infrared. Furthermore, the moderately high refractive index contrast in silicon -nitride photonic wire waveguides provides a valuable compromise between compactness, optical loss and sensitivity to phase error. Three generic types of on -chip spectrometers are discussed: the arrayed waveguide grating (AWG) spectrometer, the echelle grating or planar concave grating (PCG) spectrometer and the stationary Fourier transform spectrometer (FTS) spectrometer. Both the design as well as experimental results are presented and discussed. For the FTS spectrometer a specific design is described in detail leading to an ultra -small (0.1 mm2) footprint device with a resolution of 1 nm and a spectral range of 100nm. Examples are given of the usage of these spectrometers in refractive index biosensing, absorption spectroscopy and Raman spectroscopy.}},
  articleno    = {{UNSP 98911K}},
  author       = {{Ryckeboer, Eva and Nie, Xiaomin and Subramanian, Ananth and Martens, Daan and Bienstman, Peter and Clemmen, Stéphane and Severi, Simone and Jansen, Roelof and Roelkens, Günther and Baets, Roel}},
  booktitle    = {{SILICON PHOTONICS AND PHOTONIC INTEGRATED CIRCUITS V}},
  isbn         = {{9781510601369}},
  issn         = {{0277-786X}},
  keywords     = {{Integrated photonics,miniature spectrometers,absorption spectroscopy,Raman spectroscopy,silicon,silicon-nitride}},
  language     = {{eng}},
  location     = {{Brussels, BELGIUM}},
  pages        = {{9}},
  publisher    = {{SPIE}},
  title        = {{CMOS-compatible silicon nitride spectrometers for lab-on-a-chip spectral sensing}},
  url          = {{http://dx.doi.org/10.1117/12.2234978}},
  volume       = {{9891}},
  year         = {{2016}},
}

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