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Plasma-enhanced atomic layer deposition of iron and titanium phosphates as electrode materials for 3D-structured lithium-ion microbatteries

(2016) ECS Transactions. 75(6). p.35-44
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Citation

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Chicago
Dobbelaere, Thomas, Felix Mattelaer, Jolien Dendooven, Philippe M Vereecken, and Christophe Detavernier. 2016. “Plasma-enhanced Atomic Layer Deposition of Iron and Titanium Phosphates as Electrode Materials for 3D-structured Lithium-ion Microbatteries.” In ECS Transactions, ed. F Roozeboom, S De Gendt, JW Elam, O van der Straten, Jolien Dendooven, C Liu, and C Huffman, 75:35–44. Pennington, NJ, USA: The Electrochemical Society (ECS).
APA
Dobbelaere, T., Mattelaer, F., Dendooven, J., Vereecken, P. M., & Detavernier, C. (2016). Plasma-enhanced atomic layer deposition of iron and titanium phosphates as electrode materials for 3D-structured lithium-ion microbatteries. In F Roozeboom, S. De Gendt, J. Elam, O. van der Straten, J. Dendooven, C. Liu, & C. Huffman (Eds.), ECS Transactions (Vol. 75, pp. 35–44). Presented at the PRiME 2016 ; 230th ECS meeting, Pennington, NJ, USA: The Electrochemical Society (ECS).
Vancouver
1.
Dobbelaere T, Mattelaer F, Dendooven J, Vereecken PM, Detavernier C. Plasma-enhanced atomic layer deposition of iron and titanium phosphates as electrode materials for 3D-structured lithium-ion microbatteries. In: Roozeboom F, De Gendt S, Elam J, van der Straten O, Dendooven J, Liu C, et al., editors. ECS Transactions. Pennington, NJ, USA: The Electrochemical Society (ECS); 2016. p. 35–44.
MLA
Dobbelaere, Thomas, Felix Mattelaer, Jolien Dendooven, et al. “Plasma-enhanced Atomic Layer Deposition of Iron and Titanium Phosphates as Electrode Materials for 3D-structured Lithium-ion Microbatteries.” ECS Transactions. Ed. F Roozeboom et al. Vol. 75. Pennington, NJ, USA: The Electrochemical Society (ECS), 2016. 35–44. Print.
@inproceedings{8507041,
  author       = {Dobbelaere, Thomas and Mattelaer, Felix and Dendooven, Jolien and Vereecken, Philippe M and Detavernier, Christophe},
  booktitle    = {ECS Transactions},
  editor       = {Roozeboom, F and De Gendt, S and Elam, JW and van der Straten, O and Dendooven, Jolien and Liu, C and Huffman, C},
  issn         = {1938-5862},
  language     = {eng},
  location     = {Honolulu, HI, USA},
  number       = {6},
  pages        = {35--44},
  publisher    = {The Electrochemical Society (ECS)},
  title        = {Plasma-enhanced atomic layer deposition of iron and titanium phosphates as electrode materials for 3D-structured lithium-ion microbatteries},
  url          = {http://dx.doi.org/10.1149/07506.0035ecst},
  volume       = {75},
  year         = {2016},
}

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