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Monte Carlo simulations of atomic layer deposition on 3D large surface area structures : required precursor exposure for pillar- versus hole-type structures

Véronique Cremers UGent, Filip Geenen UGent, Christophe Detavernier UGent and Jolien Dendooven UGent (2017) JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A. 35(1).
Please use this url to cite or link to this publication:
author
organization
year
type
journalArticle (original)
publication status
published
subject
keyword
ASPECT-RATIO NANOPORES, CARBON NANOTUBES, STEP COVERAGE, CONFORMALITY, OPTIMIZATION, AL2O3, MODEL, METHODOLOGY, TRANSPORT, TRENCHES
journal title
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
J. Vac. Sci. Technol. A
volume
35
issue
1
article number
01B115
pages
6 pages
Web of Science type
Article
Web of Science id
000392120900020
ISSN
0734-2101
DOI
10.1116/1.4968201
language
English
UGent publication?
yes
classification
A1
copyright statement
I have transferred the copyright for this publication to the publisher
id
8200780
handle
http://hdl.handle.net/1854/LU-8200780
date created
2016-12-01 15:56:51
date last changed
2017-07-25 12:17:04
@article{8200780,
  articleno    = {01B115},
  author       = {Cremers, V{\'e}ronique and Geenen, Filip and Detavernier, Christophe and Dendooven, Jolien},
  issn         = {0734-2101},
  journal      = {JOURNAL OF VACUUM SCIENCE \& TECHNOLOGY A},
  keyword      = {ASPECT-RATIO NANOPORES,CARBON NANOTUBES,STEP COVERAGE,CONFORMALITY,OPTIMIZATION,AL2O3,MODEL,METHODOLOGY,TRANSPORT,TRENCHES},
  language     = {eng},
  number       = {1},
  pages        = {6},
  title        = {Monte Carlo simulations of atomic layer deposition on 3D large surface area structures : required precursor exposure for pillar- versus hole-type structures},
  url          = {http://dx.doi.org/10.1116/1.4968201},
  volume       = {35},
  year         = {2017},
}

Chicago
Cremers, Véronique, Filip Geenen, Christophe Detavernier, and Jolien Dendooven. 2017. “Monte Carlo Simulations of Atomic Layer Deposition on 3D Large Surface Area Structures : Required Precursor Exposure for Pillar- Versus Hole-type Structures.” Journal of Vacuum Science & Technology A 35 (1).
APA
Cremers, V., Geenen, F., Detavernier, C., & Dendooven, J. (2017). Monte Carlo simulations of atomic layer deposition on 3D large surface area structures : required precursor exposure for pillar- versus hole-type structures. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 35(1).
Vancouver
1.
Cremers V, Geenen F, Detavernier C, Dendooven J. Monte Carlo simulations of atomic layer deposition on 3D large surface area structures : required precursor exposure for pillar- versus hole-type structures. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A. 2017;35(1).
MLA
Cremers, Véronique, Filip Geenen, Christophe Detavernier, et al. “Monte Carlo Simulations of Atomic Layer Deposition on 3D Large Surface Area Structures : Required Precursor Exposure for Pillar- Versus Hole-type Structures.” JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 35.1 (2017): n. pag. Print.