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Abstract
This paper presents a low-complexity and low temperature (85 degrees C) fabrication process for vibration energy harvesters. The process employs lamination steps to transfer thinned PZT thick sheets onto flexible polymeric substrates, using dry film photoresist. The influence of geometrical parameters on the device performance were assessed by FEM simulations (using COMSOL) and supported by experiments. Optimization of the output power was performed by modifying the neutral plane within the device and by using a localized seismic mass at the tip, which has resulted in an output power of 30 mu W at 52 Hz and an acceleration of 1g. Finally, a low-complexity and fully polymeric package is proposed, which together with the harvester process are compatible with large area fabrication methods.

Citation

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MLA
Vasquez Quintero, Andrés Felipe et al. “Vibration Energy Harvesters on Plastic Foil by Lamination of PZT Thick Sheets.” Proceedings IEEE Micro Electro Mechanical Systems. NEW YORK: IEEE, 2012. Print.
APA
Vasquez Quintero, A. F., Briand, D., Janphuang, P., Ruan, J., Lockhart, R., & de Rooij, N. (2012). Vibration energy harvesters on plastic foil by lamination of PZT thick sheets. Proceedings IEEE Micro Electro Mechanical Systems. Presented at the 25th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), NEW YORK: IEEE.
Chicago author-date
Vasquez Quintero, Andrés Felipe, D Briand, P Janphuang, JJ Ruan, R Lockhart, and NF de Rooij. 2012. “Vibration Energy Harvesters on Plastic Foil by Lamination of PZT Thick Sheets.” In Proceedings IEEE Micro Electro Mechanical Systems. NEW YORK: IEEE.
Chicago author-date (all authors)
Vasquez Quintero, Andrés Felipe, D Briand, P Janphuang, JJ Ruan, R Lockhart, and NF de Rooij. 2012. “Vibration Energy Harvesters on Plastic Foil by Lamination of PZT Thick Sheets.” In Proceedings IEEE Micro Electro Mechanical Systems. NEW YORK: IEEE.
Vancouver
1.
Vasquez Quintero AF, Briand D, Janphuang P, Ruan J, Lockhart R, de Rooij N. Vibration energy harvesters on plastic foil by lamination of PZT thick sheets. Proceedings IEEE Micro Electro Mechanical Systems. NEW YORK: IEEE; 2012.
IEEE
[1]
A. F. Vasquez Quintero, D. Briand, P. Janphuang, J. Ruan, R. Lockhart, and N. de Rooij, “Vibration energy harvesters on plastic foil by lamination of PZT thick sheets,” in Proceedings IEEE Micro Electro Mechanical Systems, Paris, FRANCE, 2012.
@inproceedings{8162790,
  abstract     = {This paper presents a low-complexity and low temperature (85 degrees C) fabrication process for vibration energy harvesters. The process employs lamination steps to transfer thinned PZT thick sheets onto flexible polymeric substrates, using dry film photoresist. The influence of geometrical parameters on the device performance were assessed by FEM simulations (using COMSOL) and supported by experiments. Optimization of the output power was performed by modifying the neutral plane within the device and by using a localized seismic mass at the tip, which has resulted in an output power of 30 mu W at 52 Hz and an acceleration of 1g. Finally, a low-complexity and fully polymeric package is proposed, which together with the harvester process are compatible with large area fabrication methods.},
  author       = {Vasquez Quintero, Andrés Felipe and Briand, D and Janphuang, P and Ruan, JJ and Lockhart, R and de Rooij, NF},
  booktitle    = {Proceedings IEEE Micro Electro Mechanical Systems},
  isbn         = {978-1-4673-0325-5},
  issn         = {1084-6999},
  language     = {eng},
  location     = {Paris, FRANCE},
  pages        = {4},
  publisher    = {IEEE},
  title        = {Vibration energy harvesters on plastic foil by lamination of PZT thick sheets},
  year         = {2012},
}

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