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Novel micromirror design with variable pull-in voltage

Roel Beernaert UGent, Tomas Podprocky UGent, Jeroen De Coster, Ann Witvrouw, Luc Haspeslagh, Aykut Avci UGent, Jelle De Smet UGent and Herbert De Smet UGent (2010) MICROELECTRONIC ENGINEERING. 87(5-8). p.1248-1252
Please use this url to cite or link to this publication:
author
organization
year
type
journalArticle (proceedingsPaper)
publication status
published
subject
keyword
DISPLAY, Micromirror, Multiple electrodes, MEMS, Pull-in voltage, Variable pull-in
journal title
MICROELECTRONIC ENGINEERING
Microelectron. Eng.
volume
87
issue
5-8
pages
1248 - 1252
conference name
35th International Conference on Micro-and Nano-Engineering
conference location
Ghent, Belgium
conference start
2009-09-28
conference end
2009-10-01
Web of Science type
Proceedings Paper
Web of Science id
000276300700142
JCR category
ENGINEERING, ELECTRICAL & ELECTRONIC
JCR impact factor
1.569 (2010)
JCR rank
66/247 (2010)
JCR quartile
2 (2010)
ISSN
0167-9317
DOI
10.1016/j.mee.2009.11.104
language
English
UGent publication?
yes
classification
A1
copyright statement
I have transferred the copyright for this publication to the publisher
id
812132
handle
http://hdl.handle.net/1854/LU-812132
date created
2009-12-15 15:51:00
date last changed
2010-04-19 13:15:56
@article{812132,
  author       = {Beernaert, Roel and Podprocky, Tomas and De Coster, Jeroen and Witvrouw, Ann and Haspeslagh, Luc and Avci, Aykut and De Smet, Jelle and De Smet, Herbert},
  issn         = {0167-9317},
  journal      = {MICROELECTRONIC ENGINEERING},
  keyword      = {DISPLAY,Micromirror,Multiple electrodes,MEMS,Pull-in voltage,Variable pull-in},
  language     = {eng},
  location     = {Ghent, Belgium},
  number       = {5-8},
  pages        = {1248--1252},
  title        = {Novel micromirror design with variable pull-in voltage},
  url          = {http://dx.doi.org/10.1016/j.mee.2009.11.104},
  volume       = {87},
  year         = {2010},
}

Chicago
Beernaert, Roel, Tomas Podprocky, Jeroen De Coster, Ann Witvrouw, Luc Haspeslagh, Aykut Avci, Jelle De Smet, and Herbert De Smet. 2010. “Novel Micromirror Design with Variable Pull-in Voltage.” Microelectronic Engineering 87 (5-8): 1248–1252.
APA
Beernaert, R., Podprocky, T., De Coster, J., Witvrouw, A., Haspeslagh, L., Avci, A., De Smet, J., et al. (2010). Novel micromirror design with variable pull-in voltage. MICROELECTRONIC ENGINEERING, 87(5-8), 1248–1252. Presented at the 35th International Conference on Micro-and Nano-Engineering.
Vancouver
1.
Beernaert R, Podprocky T, De Coster J, Witvrouw A, Haspeslagh L, Avci A, et al. Novel micromirror design with variable pull-in voltage. MICROELECTRONIC ENGINEERING. 2010;87(5-8):1248–52.
MLA
Beernaert, Roel, Tomas Podprocky, Jeroen De Coster, et al. “Novel Micromirror Design with Variable Pull-in Voltage.” MICROELECTRONIC ENGINEERING 87.5-8 (2010): 1248–1252. Print.