Advanced search
3 files | 1.77 MB Add to list

Novel micromirror design with variable pull-in voltage

(2010) MICROELECTRONIC ENGINEERING. 87(5-8). p.1248-1252
Author
Organization
Keywords
DISPLAY, Micromirror, Multiple electrodes, MEMS, Pull-in voltage, Variable pull-in

Downloads

  • (...).pdf
    • full text
    • |
    • UGent only
    • |
    • PDF
    • |
    • 659.25 KB
  • (...).pdf
    • full text
    • |
    • UGent only
    • |
    • PDF
    • |
    • 684.76 KB
  • Final manuscript.pdf
    • full text
    • |
    • open access
    • |
    • PDF
    • |
    • 429.30 KB

Citation

Please use this url to cite or link to this publication:

MLA
Beernaert, Roel et al. “Novel Micromirror Design with Variable Pull-in Voltage.” MICROELECTRONIC ENGINEERING 87.5-8 (2010): 1248–1252. Print.
APA
Beernaert, R., Podprocky, T., De Coster, J., Witvrouw, A., Haspeslagh, L., Avci, A., De Smet, J., et al. (2010). Novel micromirror design with variable pull-in voltage. MICROELECTRONIC ENGINEERING, 87(5-8), 1248–1252. Presented at the 35th International Conference on Micro-and Nano-Engineering.
Chicago author-date
Beernaert, Roel, Tomas Podprocky, Jeroen De Coster, Ann Witvrouw, Luc Haspeslagh, Aykut Avci, Jelle De Smet, and Herbert De Smet. 2010. “Novel Micromirror Design with Variable Pull-in Voltage.” Microelectronic Engineering 87 (5-8): 1248–1252.
Chicago author-date (all authors)
Beernaert, Roel, Tomas Podprocky, Jeroen De Coster, Ann Witvrouw, Luc Haspeslagh, Aykut Avci, Jelle De Smet, and Herbert De Smet. 2010. “Novel Micromirror Design with Variable Pull-in Voltage.” Microelectronic Engineering 87 (5-8): 1248–1252.
Vancouver
1.
Beernaert R, Podprocky T, De Coster J, Witvrouw A, Haspeslagh L, Avci A, et al. Novel micromirror design with variable pull-in voltage. MICROELECTRONIC ENGINEERING. 2010;87(5-8):1248–52.
IEEE
[1]
R. Beernaert et al., “Novel micromirror design with variable pull-in voltage,” MICROELECTRONIC ENGINEERING, vol. 87, no. 5–8, pp. 1248–1252, 2010.
@article{812132,
  author       = {Beernaert, Roel and Podprocky, Tomas and De Coster, Jeroen and Witvrouw, Ann and Haspeslagh, Luc and Avci, Aykut and De Smet, Jelle and De Smet, Herbert},
  issn         = {0167-9317},
  journal      = {MICROELECTRONIC ENGINEERING},
  keywords     = {DISPLAY,Micromirror,Multiple electrodes,MEMS,Pull-in voltage,Variable pull-in},
  language     = {eng},
  location     = {Ghent, Belgium},
  number       = {5-8},
  pages        = {1248--1252},
  title        = {Novel micromirror design with variable pull-in voltage},
  url          = {http://dx.doi.org/10.1016/j.mee.2009.11.104},
  volume       = {87},
  year         = {2010},
}

Altmetric
View in Altmetric
Web of Science
Times cited: