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Micromirror with electromechanical pulse width modulation

Roel Beernaert, Tomas Podprocky (UGent) , Aykut Avci (UGent) , Jelle De Smet (UGent) and Herbert De Smet (UGent)
Author
Organization
Abstract
A novel micromirror design is presented that can be used as a pixel in a light valve. This mirror allows grey levels to be produced without the need for binary subframes. Analog pulsewidth modulation (PWM) will be achieved without needing extra transistors in the CMOS layer below the mirror structure. This can be done by exploiting an electro-mechanical phenomenon known as ‘pull-in’. It will be shown that it is possible to make the mirror switch from a positively tilted to a negatively tilted state and back with a duty ratio that is dependent on fixed voltages on two out of four addressing electrodes underneath the mirror. The other electrodes are driven with two independent triangular waveforms. The mirror thus performs an analog to PWM conversion at the MEMS level, not at the CMOS level. The number and the distribution of grey levels does not depend on the number of binary subframes or bitplanes, resulting in less severe speed requirements for the on-chip electronics.
Keywords
Pull-in voltage, Micromirror, Variable pull-in, MEMS, Multiple electrodes

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Citation

Please use this url to cite or link to this publication:

MLA
Beernaert, Roel et al. “Micromirror with Electromechanical Pulse Width Modulation.” Conference Record of the International Display Research Conference. Ed. Norbert Fruehauf. Society for Information Display (SID), 2009. 428–431. Print.
APA
Beernaert, R., Podprocky, T., Avci, A., De Smet, J., & De Smet, H. (2009). Micromirror with electromechanical pulse width modulation. In N. Fruehauf (Ed.), CONFERENCE RECORD OF THE INTERNATIONAL DISPLAY RESEARCH CONFERENCE (pp. 428–431). Presented at the 29th International Display Research Conference (IDRC 2009 / Eurodisplay 2009), Society for Information Display (SID).
Chicago author-date
Beernaert, Roel, Tomas Podprocky, Aykut Avci, Jelle De Smet, and Herbert De Smet. 2009. “Micromirror with Electromechanical Pulse Width Modulation.” In Conference Record of the International Display Research Conference, ed. Norbert Fruehauf, 428–431. Society for Information Display (SID).
Chicago author-date (all authors)
Beernaert, Roel, Tomas Podprocky, Aykut Avci, Jelle De Smet, and Herbert De Smet. 2009. “Micromirror with Electromechanical Pulse Width Modulation.” In Conference Record of the International Display Research Conference, ed. Norbert Fruehauf, 428–431. Society for Information Display (SID).
Vancouver
1.
Beernaert R, Podprocky T, Avci A, De Smet J, De Smet H. Micromirror with electromechanical pulse width modulation. In: Fruehauf N, editor. CONFERENCE RECORD OF THE INTERNATIONAL DISPLAY RESEARCH CONFERENCE. Society for Information Display (SID); 2009. p. 428–31.
IEEE
[1]
R. Beernaert, T. Podprocky, A. Avci, J. De Smet, and H. De Smet, “Micromirror with electromechanical pulse width modulation,” in CONFERENCE RECORD OF THE INTERNATIONAL DISPLAY RESEARCH CONFERENCE, Rome, Italy, 2009, pp. 428–431.
@inproceedings{812120,
  abstract     = {A novel micromirror design is presented that can be used as a pixel in a light valve. This mirror allows grey levels to be produced without the need for binary subframes. Analog pulsewidth modulation (PWM) will be achieved without needing extra transistors in the CMOS layer below the mirror structure. This can be done by exploiting an electro-mechanical phenomenon known as ‘pull-in’. It will be shown that it is possible to make the mirror switch from a positively tilted to a negatively tilted state and back with a duty ratio that is dependent on fixed voltages on two out of four addressing electrodes underneath the mirror. The other electrodes are driven with two independent triangular waveforms. The mirror thus performs an analog to PWM conversion at the MEMS level, not at the CMOS level. The number and the distribution of grey levels does not depend on the number of binary subframes or bitplanes, resulting in less severe speed requirements for the on-chip electronics.},
  author       = {Beernaert, Roel and Podprocky, Tomas and Avci, Aykut and De Smet, Jelle and De Smet, Herbert},
  booktitle    = {CONFERENCE RECORD OF THE INTERNATIONAL DISPLAY RESEARCH CONFERENCE},
  editor       = {Fruehauf, Norbert},
  issn         = {1083-1312},
  keywords     = {Pull-in voltage,Micromirror,Variable pull-in,MEMS,Multiple electrodes},
  language     = {eng},
  location     = {Rome, Italy},
  pages        = {428--431},
  publisher    = {Society for Information Display (SID)},
  title        = {Micromirror with electromechanical pulse width modulation},
  year         = {2009},
}

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