Advanced search
1 file | 4.54 MB Add to list

Plasma-enhanced atomic layer deposition of iron phosphate as a positive electrode for 3D lithium-ion microbatteries

(2016) CHEMISTRY OF MATERIALS. 28(10). p.3435-3445
Author
Organization
Abstract
A new plasma-enhanced atomic layer deposition process was developed to deposit iron phosphate by using a sequence of trimethyl phosphate (TMP, Me3PO4) plasma, O-2 plasma, and tert-butylferrocene (TBF, Fe(C5H5)(C5H4C-(CH3)(3))) exposures. Using in situ spectroscopic ellipsometry and ex situ X-ray reflectometry, the growth linearity, growth per cycle (GPC), and density of the resulting thin films was investigated as a function of the pulse times and the substrate temperature. At a substrate temperature of 300 degrees C and using saturated pulse times, an exceptionally high GPC of 1.1 nm/cycle without nucleation delay was achieved, resulting in amorphous films with an empirical stoichiometry of FeP1.5O4.7 with 0.9% hydrogen and no detectable carbon residue. Trigonal FePO4 (Berlinite) was formed upon annealing in air. Remarkably, annealing in helium resulted in the formation of elemental phosphorus. The as-deposited, amorphous material became active as a Li-ion cathode after an initial irreversible electrochemical lithiation, showing insertion and extraction of Li+ around a potential of 3.1 V vs Li/Li+. By conformally depositing the same material on a 3D-microstructured substrate consisting of Pt-coated Si micropillars, the capacity could be drastically increased without sacrificing rate performance.
Keywords
ALUMINUM PHOSPHATE, ENERGY-STORAGE, OXIDE THIN-FILMS, BATTERIES, FEPO4, CATHODE, PERFORMANCE, STATE

Downloads

  • (...).pdf
    • full text
    • |
    • UGent only
    • |
    • PDF
    • |
    • 4.54 MB

Citation

Please use this url to cite or link to this publication:

MLA
Dobbelaere, Thomas et al. “Plasma-enhanced Atomic Layer Deposition of Iron Phosphate as a Positive Electrode for 3D Lithium-ion Microbatteries.” CHEMISTRY OF MATERIALS 28.10 (2016): 3435–3445. Print.
APA
Dobbelaere, T., Mattelaer, F., Dendooven, J., Vereecken, P., & Detavernier, C. (2016). Plasma-enhanced atomic layer deposition of iron phosphate as a positive electrode for 3D lithium-ion microbatteries. CHEMISTRY OF MATERIALS, 28(10), 3435–3445.
Chicago author-date
Dobbelaere, Thomas, Felix Mattelaer, Jolien Dendooven, Philippe Vereecken, and Christophe Detavernier. 2016. “Plasma-enhanced Atomic Layer Deposition of Iron Phosphate as a Positive Electrode for 3D Lithium-ion Microbatteries.” Chemistry of Materials 28 (10): 3435–3445.
Chicago author-date (all authors)
Dobbelaere, Thomas, Felix Mattelaer, Jolien Dendooven, Philippe Vereecken, and Christophe Detavernier. 2016. “Plasma-enhanced Atomic Layer Deposition of Iron Phosphate as a Positive Electrode for 3D Lithium-ion Microbatteries.” Chemistry of Materials 28 (10): 3435–3445.
Vancouver
1.
Dobbelaere T, Mattelaer F, Dendooven J, Vereecken P, Detavernier C. Plasma-enhanced atomic layer deposition of iron phosphate as a positive electrode for 3D lithium-ion microbatteries. CHEMISTRY OF MATERIALS. 2016;28(10):3435–45.
IEEE
[1]
T. Dobbelaere, F. Mattelaer, J. Dendooven, P. Vereecken, and C. Detavernier, “Plasma-enhanced atomic layer deposition of iron phosphate as a positive electrode for 3D lithium-ion microbatteries,” CHEMISTRY OF MATERIALS, vol. 28, no. 10, pp. 3435–3445, 2016.
@article{8083020,
  abstract     = {A new plasma-enhanced atomic layer deposition process was developed to deposit iron phosphate by using a sequence of trimethyl phosphate (TMP, Me3PO4) plasma, O-2 plasma, and tert-butylferrocene (TBF, Fe(C5H5)(C5H4C-(CH3)(3))) exposures. Using in situ spectroscopic ellipsometry and ex situ X-ray reflectometry, the growth linearity, growth per cycle (GPC), and density of the resulting thin films was investigated as a function of the pulse times and the substrate temperature. At a substrate temperature of 300 degrees C and using saturated pulse times, an exceptionally high GPC of 1.1 nm/cycle without nucleation delay was achieved, resulting in amorphous films with an empirical stoichiometry of FeP1.5O4.7 with 0.9% hydrogen and no detectable carbon residue. Trigonal FePO4 (Berlinite) was formed upon annealing in air. Remarkably, annealing in helium resulted in the formation of elemental phosphorus. The as-deposited, amorphous material became active as a Li-ion cathode after an initial irreversible electrochemical lithiation, showing insertion and extraction of Li+ around a potential of 3.1 V vs Li/Li+. By conformally depositing the same material on a 3D-microstructured substrate consisting of Pt-coated Si micropillars, the capacity could be drastically increased without sacrificing rate performance.},
  author       = {Dobbelaere, Thomas and Mattelaer, Felix and Dendooven, Jolien and Vereecken, Philippe and Detavernier, Christophe},
  issn         = {0897-4756},
  journal      = {CHEMISTRY OF MATERIALS},
  keywords     = {ALUMINUM PHOSPHATE,ENERGY-STORAGE,OXIDE THIN-FILMS,BATTERIES,FEPO4,CATHODE,PERFORMANCE,STATE},
  language     = {eng},
  number       = {10},
  pages        = {3435--3445},
  title        = {Plasma-enhanced atomic layer deposition of iron phosphate as a positive electrode for 3D lithium-ion microbatteries},
  url          = {http://dx.doi.org/10.1021/acs.chemmater.6b00853},
  volume       = {28},
  year         = {2016},
}

Altmetric
View in Altmetric
Web of Science
Times cited: