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Plasma-enhanced atomic layer deposition of zinc phosphate

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Keywords
Zinc phosphate, OZONE, GLASS, Phosphates, Plasma-enhanced, Atomic layer deposition, OXIDE, THIN-FILMS, ALUMINUM PHOSPHATE

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Citation

Please use this url to cite or link to this publication:

MLA
Dobbelaere, Thomas et al. “Plasma-enhanced Atomic Layer Deposition of Zinc Phosphate.” JOURNAL OF NON-CRYSTALLINE SOLIDS 444 (2016): 43–48. Print.
APA
Dobbelaere, T., Minjauw, M., Ahmad, T., Vereecken, P., & Detavernier, C. (2016). Plasma-enhanced atomic layer deposition of zinc phosphate. JOURNAL OF NON-CRYSTALLINE SOLIDS, 444, 43–48.
Chicago author-date
Dobbelaere, Thomas, Matthias Minjauw, Tareq Ahmad, PM Vereecken, and Christophe Detavernier. 2016. “Plasma-enhanced Atomic Layer Deposition of Zinc Phosphate.” Journal of Non-crystalline Solids 444: 43–48.
Chicago author-date (all authors)
Dobbelaere, Thomas, Matthias Minjauw, Tareq Ahmad, PM Vereecken, and Christophe Detavernier. 2016. “Plasma-enhanced Atomic Layer Deposition of Zinc Phosphate.” Journal of Non-crystalline Solids 444: 43–48.
Vancouver
1.
Dobbelaere T, Minjauw M, Ahmad T, Vereecken P, Detavernier C. Plasma-enhanced atomic layer deposition of zinc phosphate. JOURNAL OF NON-CRYSTALLINE SOLIDS. 2016;444:43–8.
IEEE
[1]
T. Dobbelaere, M. Minjauw, T. Ahmad, P. Vereecken, and C. Detavernier, “Plasma-enhanced atomic layer deposition of zinc phosphate,” JOURNAL OF NON-CRYSTALLINE SOLIDS, vol. 444, pp. 43–48, 2016.
@article{8083013,
  author       = {Dobbelaere, Thomas and Minjauw, Matthias and Ahmad, Tareq and Vereecken, PM and Detavernier, Christophe},
  issn         = {0022-3093},
  journal      = {JOURNAL OF NON-CRYSTALLINE SOLIDS},
  keywords     = {Zinc phosphate,OZONE,GLASS,Phosphates,Plasma-enhanced,Atomic layer deposition,OXIDE,THIN-FILMS,ALUMINUM PHOSPHATE},
  language     = {eng},
  pages        = {43--48},
  title        = {Plasma-enhanced atomic layer deposition of zinc phosphate},
  url          = {http://dx.doi.org/10.1016/j.jnoncrysol.2016.04.032},
  volume       = {444},
  year         = {2016},
}

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