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Silicon photonics : silicon nitride versus silicon-on-insulator

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Center for nano- and biophotonics (NB-Photonics)
Abstract
Silicon photonics typically builds on a silicon-on-insulator based high-index-contrast waveguide system. Silicon nitride provides an alternative moderate-index-contrast system that is manufacturable in the same CMOS environment. This paper discusses the relative benefits of both platforms.
Keywords
COLLECTION, CHIP, INTEGRATION, GRATING COUPLER, PLATFORM, FREQUENCY COMB GENERATION, WAVE-GUIDES, SUPERCONTINUUM GENERATION, EVANESCENT EXCITATION, VISIBLE WAVELENGTHS

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Citation

Please use this url to cite or link to this publication:

MLA
Baets, Roel et al. “Silicon Photonics : Silicon Nitride Versus Silicon-on-insulator.” 2016 OPTICAL FIBER COMMUNICATIONS CONFERENCE AND EXHIBITION (OFC). Washington, DC, USA: The Optical Society (OSA), 2016. Print.
APA
Baets, R., Subramanian, A., Clemmen, S., Kuyken, B., Bienstman, P., Le Thomas, N., Roelkens, G., et al. (2016). Silicon photonics : silicon nitride versus silicon-on-insulator. 2016 OPTICAL FIBER COMMUNICATIONS CONFERENCE AND EXHIBITION (OFC). Presented at the Optical Fiber Communications Conference and Exhibition (OFC), Washington, DC, USA: The Optical Society (OSA).
Chicago author-date
Baets, Roel, Ananth Subramanian, Stéphane Clemmen, Bart Kuyken, Peter Bienstman, Nicolas Le Thomas, Günther Roelkens, Dries Van Thourhout, Philippe Helin, and Severi Severi. 2016. “Silicon Photonics : Silicon Nitride Versus Silicon-on-insulator.” In 2016 OPTICAL FIBER COMMUNICATIONS CONFERENCE AND EXHIBITION (OFC). Washington, DC, USA: The Optical Society (OSA).
Chicago author-date (all authors)
Baets, Roel, Ananth Subramanian, Stéphane Clemmen, Bart Kuyken, Peter Bienstman, Nicolas Le Thomas, Günther Roelkens, Dries Van Thourhout, Philippe Helin, and Severi Severi. 2016. “Silicon Photonics : Silicon Nitride Versus Silicon-on-insulator.” In 2016 OPTICAL FIBER COMMUNICATIONS CONFERENCE AND EXHIBITION (OFC). Washington, DC, USA: The Optical Society (OSA).
Vancouver
1.
Baets R, Subramanian A, Clemmen S, Kuyken B, Bienstman P, Le Thomas N, et al. Silicon photonics : silicon nitride versus silicon-on-insulator. 2016 OPTICAL FIBER COMMUNICATIONS CONFERENCE AND EXHIBITION (OFC). Washington, DC, USA: The Optical Society (OSA); 2016.
IEEE
[1]
R. Baets et al., “Silicon photonics : silicon nitride versus silicon-on-insulator,” in 2016 OPTICAL FIBER COMMUNICATIONS CONFERENCE AND EXHIBITION (OFC), Anaheim, CA, USA, 2016.
@inproceedings{8082286,
  abstract     = {Silicon photonics typically builds on a silicon-on-insulator based high-index-contrast waveguide system. Silicon nitride provides an alternative moderate-index-contrast system that is manufacturable in the same CMOS environment. This paper discusses the relative benefits of both platforms.},
  articleno    = {paper Th3J.1},
  author       = {Baets, Roel and Subramanian, Ananth and Clemmen, Stéphane and Kuyken, Bart and Bienstman, Peter and Le Thomas, Nicolas and Roelkens, Günther and Van Thourhout, Dries and Helin, Philippe and Severi, Severi},
  booktitle    = {2016 OPTICAL FIBER COMMUNICATIONS CONFERENCE AND EXHIBITION (OFC)},
  isbn         = {9781943580071},
  keywords     = {COLLECTION,CHIP,INTEGRATION,GRATING COUPLER,PLATFORM,FREQUENCY COMB GENERATION,WAVE-GUIDES,SUPERCONTINUUM GENERATION,EVANESCENT EXCITATION,VISIBLE WAVELENGTHS},
  language     = {eng},
  location     = {Anaheim, CA, USA},
  pages        = {3},
  publisher    = {The Optical Society (OSA)},
  title        = {Silicon photonics : silicon nitride versus silicon-on-insulator},
  url          = {http://dx.doi.org/10.1364/OFC.2016.Th3J.1},
  year         = {2016},
}

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