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Plasma-enhanced ALD on particles and powders

Geert Rampelberg (UGent) , Delphine Longrie (UGent) , Davy Deduytsche (UGent) , Johan Haemers (UGent) and Christophe Detavernier (UGent)
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Organization
Keywords
powders, atomic layer deposition, rotary reactor, plasma, particles

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Citation

Please use this url to cite or link to this publication:

Chicago
Rampelberg, Geert, Delphine Longrie, Davy Deduytsche, Johan Haemers, and Christophe Detavernier. 2016. “Plasma-enhanced ALD on Particles and Powders.” In Plasma Surface Engineering, 15th International Conference, Abstracts.
APA
Rampelberg, G., Longrie, D., Deduytsche, D., Haemers, J., & Detavernier, C. (2016). Plasma-enhanced ALD on particles and powders. Plasma Surface Engineering, 15th International conference, Abstracts. Presented at the 15th International conference on Plasma Surface Engineering (PSE 2016).
Vancouver
1.
Rampelberg G, Longrie D, Deduytsche D, Haemers J, Detavernier C. Plasma-enhanced ALD on particles and powders. Plasma Surface Engineering, 15th International conference, Abstracts. 2016.
MLA
Rampelberg, Geert, Delphine Longrie, Davy Deduytsche, et al. “Plasma-enhanced ALD on Particles and Powders.” Plasma Surface Engineering, 15th International Conference, Abstracts. 2016. Print.
@inproceedings{8079568,
  author       = {Rampelberg, Geert and Longrie, Delphine and Deduytsche, Davy and Haemers, Johan and Detavernier, Christophe},
  booktitle    = {Plasma Surface Engineering, 15th International conference, Abstracts},
  keyword      = {powders,atomic layer deposition,rotary reactor,plasma,particles},
  language     = {eng},
  location     = {Garmisch-Partenkirchen, Germany},
  title        = {Plasma-enhanced ALD on particles and powders},
  year         = {2016},
}