Advanced search
1 file | 1.55 MB Add to list

Parabolic crossed planar polymeric x-ray lenses

Author
Organization
Abstract
The principles of design and manufacturing of the polymer planar x-ray lenses focusing in one and two directions, as well as the peculiarities of optical behaviors and the results of the lens test are reported in this paper. The methods of electron and deep x-ray lithography used in lens manufacturing allow the manufacture of ten or more x-ray lenses on one substrate; the lenses show focal lengths down to several centimeters for photon energies between 5 and 40 keV. The measured focus size was 105 nm for a linear lens with an intensity gain of about 407, and 300 x 770 nm for a crossed lens with an intensity gain of 6470.
Keywords
LITHOGRAPHY, BERYLLIUM, FABRICATION, REFRACTIVE LENSES, SU-8 RESIST

Downloads

  • (...).pdf
    • full text
    • |
    • UGent only
    • |
    • PDF
    • |
    • 1.55 MB

Citation

Please use this url to cite or link to this publication:

MLA
Nazmov, V., et al. “Parabolic Crossed Planar Polymeric X-Ray Lenses.” JOURNAL OF MICROMECHANICS AND MICROENGINEERING, vol. 21, no. 1, 2011, doi:10.1088/0960-1317/21/1/015020.
APA
Nazmov, V., Reznikova, E., Mohr, J., Saile, V., Vincze, L., Vekemans, B., … Somogyi, A. (2011). Parabolic crossed planar polymeric x-ray lenses. JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 21(1). https://doi.org/10.1088/0960-1317/21/1/015020
Chicago author-date
Nazmov, V, E Reznikova, J Mohr, V Saile, Laszlo Vincze, Bart Vekemans, S Bohic, and A Somogyi. 2011. “Parabolic Crossed Planar Polymeric X-Ray Lenses.” JOURNAL OF MICROMECHANICS AND MICROENGINEERING 21 (1). https://doi.org/10.1088/0960-1317/21/1/015020.
Chicago author-date (all authors)
Nazmov, V, E Reznikova, J Mohr, V Saile, Laszlo Vincze, Bart Vekemans, S Bohic, and A Somogyi. 2011. “Parabolic Crossed Planar Polymeric X-Ray Lenses.” JOURNAL OF MICROMECHANICS AND MICROENGINEERING 21 (1). doi:10.1088/0960-1317/21/1/015020.
Vancouver
1.
Nazmov V, Reznikova E, Mohr J, Saile V, Vincze L, Vekemans B, et al. Parabolic crossed planar polymeric x-ray lenses. JOURNAL OF MICROMECHANICS AND MICROENGINEERING. 2011;21(1).
IEEE
[1]
V. Nazmov et al., “Parabolic crossed planar polymeric x-ray lenses,” JOURNAL OF MICROMECHANICS AND MICROENGINEERING, vol. 21, no. 1, 2011.
@article{8067545,
  abstract     = {{The principles of design and manufacturing of the polymer planar x-ray lenses focusing in one and two directions, as well as the peculiarities of optical behaviors and the results of the lens test are reported in this paper. The methods of electron and deep x-ray lithography used in lens manufacturing allow the manufacture of ten or more x-ray lenses on one substrate; the lenses show focal lengths down to several centimeters for photon energies between 5 and 40 keV. The measured focus size was 105 nm for a linear lens with an intensity gain of about 407, and 300 x 770 nm for a crossed lens with an intensity gain of 6470.}},
  articleno    = {{015020}},
  author       = {{Nazmov, V and Reznikova, E and Mohr, J and Saile, V and Vincze, Laszlo and Vekemans, Bart and Bohic, S and Somogyi, A}},
  issn         = {{0960-1317}},
  journal      = {{JOURNAL OF MICROMECHANICS AND MICROENGINEERING}},
  keywords     = {{LITHOGRAPHY,BERYLLIUM,FABRICATION,REFRACTIVE LENSES,SU-8 RESIST}},
  language     = {{eng}},
  number       = {{1}},
  pages        = {{11}},
  title        = {{Parabolic crossed planar polymeric x-ray lenses}},
  url          = {{http://doi.org/10.1088/0960-1317/21/1/015020}},
  volume       = {{21}},
  year         = {{2011}},
}

Altmetric
View in Altmetric
Web of Science
Times cited: